Experiment-Based Quantitative Analysis of Picosecond Pulse-Induced Morphological Changes in Fused Silica

2018 ◽  
Vol 6 (4) ◽  
Author(s):  
Jingwen Yan ◽  
Han Wang ◽  
Hong Shen
Keyword(s):  
Morphological Changes ◽  
Laser Pulses ◽  
Processing Parameters ◽  
Industrial Applications ◽  
Fused Silica ◽  
Picosecond Pulse ◽  
Simple Experiment ◽  
Incubation Effect ◽  
Ultrafast Laser Pulses ◽  
The Relationship

Due to its excellent quality, fused silica has been widely used in various industrial applications. The nonlinear absorptive nature of ultrafast laser pulses enables the induction of morphological changes within the bulk transparent materials. In this study, the interior modification of fused silica is induced by a picosecond pulsed laser, and the relationship between processing parameters and the modification geometry is demonstrated. Three different patterns are identified according to the geometric characteristics of the modification. Furthermore, a simple experiment-based model considering the incubation effect is put forward to predict picosecond pulse-induced morphological changes in fused silica.

scholarly journals Three-Dimensional Laser Printing of Macro-Scale Glass Objects at a Micro-Scale Resolution

Micromachines ◽  
2019 ◽  
Vol 10 (9) ◽  
pp. 565 ◽  
Author(s):  
Peng Wang ◽  
Wei Chu ◽  
Wenbo Li ◽  
Yuanxin Tan ◽  
Fang Liu ◽  
...  
Keyword(s):  
3D Printing ◽  
Three Dimensional ◽  
Laser Pulses ◽  
Fused Silica ◽  
Rapid Expansion ◽  
Ultrafast Laser Pulses ◽  
3D Objects ◽  
Macro Scale ◽  
Powerful Approach ◽  
3D Printing Technique

Three-dimensional (3D) printing has allowed for the production of geometrically complex 3D objects with extreme flexibility, which is currently undergoing rapid expansion in terms of materials, functionalities, as well as areas of application. When attempting to print 3D microstructures in glass, femtosecond laser-induced chemical etching (FLICE)—which is a subtractive 3D printing technique—has proved itself a powerful approach. Here, we demonstrate the fabrication of macro-scale 3D glass objects of large heights up to ~3.8 cm with an identical lateral and longitudinal feature size of ~20 μm. The remarkable accomplishment is achieved by revealing an unexplored regime in the interaction of ultrafast laser pulses with fused silica, which results in depth-insensitive focusing of the laser pulses inside fused silica.

A Two-Step Model for Multiple Picosecond and Femtosecond Pulses Ablation of Fused Silica

2019 ◽  
Vol 141 (6) ◽  
Author(s):  
Han Wang ◽  
Hong Shen ◽  
Zhenqiang Yao
Keyword(s):  
Light Intensity ◽  
Heat Affected Zone ◽  
Experimental Validation ◽  
Laser Pulses ◽  
Fused Silica ◽  
Ultrafast Laser ◽  
Damage Area ◽  
Ultrafast Laser Pulses ◽  
Step Model ◽  
Crater Morphology

The morphology of microchannels machined by multiple ultrafast laser pulses with 500 fs and 8 ps durations on fused silica plate is predicted by a two-step model with experimental validation in present work. A spike structure at crater boundary with different scales in 500 fs and 8 ps pulse ablation is found in the numerical investigation, which could be attributed to diffraction and attenuation of light intensity in both cases. To analyze the evolution of crater morphology and damaged area with an increasing number of pulses, the distribution of light intensity, lattice temperature, and self-trapped excitons density during certain pulses are studied. The results showed that 500 fs pulses lead to smoother crater boundary, smaller heat affected zone, and larger electrical damage area with respect to 8 ps pulses.

scholarly journals Three-Dimensional Laser Printing of Macro-Scale Glass Objects at a Micro-Scale Resolution

2019 ◽  
Author(s):  
Peng Wang ◽  
Wei Chu ◽  
Wenbo Li ◽  
Yuanxin Tan ◽  
Fang Liu ◽  
...  
Keyword(s):  
3D Printing ◽  
Three Dimensional ◽  
Laser Pulses ◽  
Fused Silica ◽  
Ultrafast Laser Pulses ◽  
3D Objects ◽  
Macro Scale ◽  
Powerful Approach ◽  
Printing Technique ◽  
3D Printing Technique

Three-dimensional (3D) printing has allowed for production of geometrically complex 3D objects with extreme flexibility, which is currently undergoing rapid expansions in terms of materials, functionalities, as well as areas of application. When attempting to print 3D microstructures in glass, femtosecond laser induced chemical etching (FLICE) – which is a subtractive 3D printing technique – has proved itself a powerful approach. Here, we demonstrate fabrication of macro-scale 3D glass objects of large heights up to ~3.8 cm with an identical lateral and longitudinal spatial resolution of ~20 μm. The remarkable accomplishment is achieved by revealing an unexplored regime in the interaction of ultrafast laser pulses with fused silica which results in aberration-free focusing of the laser pulses deeply inside fused silica.

Characterization of Morphology and Mechanical Properties of Glass Interior Irradiated by Femtosecond Laser

2010 ◽  
Vol 132 (4) ◽  
Author(s):  
Panjawat Kongsuwan ◽  
Hongliang Wang ◽  
Sinisa Vukelic ◽  
Y. Lawrence Yao
Keyword(s):  
Mechanical Properties ◽  
Femtosecond Laser ◽  
Welding Process ◽  
Laser Pulses ◽  
Structural Rearrangement ◽  
Processing Parameters ◽  
Femtosecond Laser Pulses ◽  
Fused Silica ◽  
Element Analysis ◽  
Spatially Resolved

Femtosecond laser pulses were focused in the interior of a single fused silica piece. Proper use of optical and laser processing parameters generated structural rearrangement of the material through a thermal accumulation mechanism, which could be potentially used for the transmission welding process. The morphology of generated features was studied using differential interference contrast optical microscopy. In addition, the predictive capability of the morphology is developed via a finite element analysis. The change in mechanical properties was studied through employment of spatially resolved nanoindentation. The specimen was sectioned and nanoindents were applied at the cross section to examine mechanical responses of the laser-modified region. Fracture toughness measurements are carried out to investigate the effects of the laser treatment on strength of the glass.

scholarly journals Improvement of Etching Anisotropy in Fused Silica by Double-Pulse Fabrication

Micromachines ◽  
2020 ◽  
Vol 11 (5) ◽  
pp. 483
Author(s):  
Valdemar Stankevič ◽  
Jonas Karosas ◽  
Gediminas Račiukaitis ◽  
Paulius Gečys
Keyword(s):  
Femtosecond Laser ◽  
Processing Speed ◽  
Laser Pulses ◽  
Processing Parameters ◽  
Fused Silica ◽  
Double Pulse ◽  
Pulse Delay ◽  
Pulse Processing ◽  
Wide Range ◽  
Significant Process

Femtosecond laser-induced selective etching (FLISE) is a promising technology for fabrication of a wide range of optical, mechanical and microfluidic devices. Various etching conditions, together with significant process optimisations, have already been demonstrated. However, the FLISE technology still faces severe limitations for a wide range of applications due to limited processing speed and polarization-dependent etching. In this article, we report our novel results on the double-pulse processing approach on the improvement of chemical etching anisotropy and >30% faster processing speed in fused silica. The effects of pulse delay and pulse duration were investigated for further understanding of the relations between nanograting formation and etching. The internal sub-surface modifications were recorded with double cross-polarised pulses of a femtosecond laser, and a new nanograting morphology (grid-like) was demonstrated by precisely adjusting the processing parameters in a narrow processing window. It was suggested that this grid-like morphology impacts the etching anisotropy, which could be improved by varying the delay between two orthogonally polarized laser pulses.

Material Processing Using Femtosecond Lasers: Repairing Patterned Photomasks

MRS Bulletin ◽  
2006 ◽  
Vol 31 (8) ◽  
pp. 634-638 ◽  
Author(s):  
Richard Haight ◽  
Peter Longo ◽  
Alfred Wagner
Keyword(s):  
Semiconductor Industry ◽  
Femtosecond Laser Ablation ◽  
Laser Pulses ◽  
Repair Process ◽  
Spot Size ◽  
Fused Silica ◽  
Ultrafast Laser Pulses ◽  
Light Pulses ◽  
Nanosecond Pulses ◽  
Silica Substrates

AbstractThe use of ultrafast laser pulses is having an impact on materials processing in profound ways. “Machining” with femtosecond pulses affords considerable advantages over nanosecond pulses, such as subdiffraction-limited material ablation, where ablated spot dimensions are below that achievable when longer pulses are focused to the minimum spot size dictated by optical physics. These properties have been exploited to address what had become a critical problem in the semiconductor industry, the repair of patterned photomasks. We will describe how the fundamentals of femtosecond laser ablation have been implemented in a machine designed to repair photomasks. We will also describe experiments designed to deposit Cr metal onto fused-silica substrates using 100-fs, 400-nm light pulses at atmospheric pressure. Multiphoton dissociation of Cr(CO)6 adsorbed on fused-silica substrates initiates Cr deposition. The mechanisms for deposition on both transparent (fused silica) and absorbing (Cr metal) substrates are discussed. Finally, we describe experiments that were carried out to extend the photomask repair process to shorter wavelengths (below 200 nm) using light generated by frequency-mixing of ultrashort, 30-fs pulses in an Ar-filled capillary.

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