A Systematic Method for Developing Harmonic Cantilevers for Atomic Force Microscopy
Keyword(s):
Ion Beam
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This paper proposes a method for developing harmonic cantilevers for tapping mode atomic force microscopy (AFM). The natural frequencies of an AFM cantilever are tuned by inserting gridiron holes with specific sizes and locations, such that the higher order resonance frequencies can be assigned to be integer harmonics generated by the nonlinear tip–sample interaction force. The cantilever is modeled using the vibration theory of the Timoshenko beam with a nonuniform cross section. The designed cantilever is fabricated by modifying a commercial cantilever through focused ion beam (FIB) milling. The resonant frequencies of the designed cantilever are verified using a commercial AFM.
High aspect ratio all diamond tips formed by focused ion beam for conducting atomic force microscopy
1999 ◽
Vol 17
(4)
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pp. 1570
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Keyword(s):
Ion Beam
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