Design and Experimental Testing of an Improved Large-Range Decoupled XY Compliant Parallel Micromanipulator1

2015 ◽  
Vol 7 (4) ◽  
Author(s):  
Jingjun Yu ◽  
Yan Xie ◽  
Zhenguo Li ◽  
Guangbo Hao
Keyword(s):  
Range Of Motion ◽  
Parallel Manipulator ◽  
Large Range ◽  
Experimental Testing ◽  
Experimental Results ◽  
Topology Design ◽  
Motion Range ◽  
Large Motion ◽  
Cross Axis ◽  
Large Improvement

There is an increasing need for XY compliant parallel micromanipulators (CPMs) providing good performance characteristics such as large motion range, well-constrained cross-axis coupling, and parasitic rotation. Decoupled topology design of the CPMs can easily realize these merits without increasing the difficulty of controlling. This paper proposes an improved 4-PP model on the basis of a classical 4-PP model and both of them are selected for manufacturing and testing to verify the effectiveness of the improvement. It has shown from experimental results that there is a large improvement on the performances of improved 4-PP compliant parallel manipulator (CPM): large range of motion up to 5 mm × 5 mm in the unidirection in the dimension of 311 mm × 311 mm × 24 mm, smaller compliance fluctuation (only 36.63% of that of the initial 4-PP model), smaller cross-axis coupling (only 28.10% of that of the initial 4-PP model generated by a single-axis 5 mm actuation), smaller in-plane parasitic yaw (only 57.14% of that of the initial 4-PP model generated by double-axis 5 mm actuation).

Design and analysis of a novel large-range 3-DOF compliant parallel micromanipulator

2021 ◽  
Vol 13 (12) ◽  
pp. 168781402110344
Author(s):  
Jinhai Gao ◽  
Xiaoqiang Han ◽  
Lina Hao ◽  
Ligang Chen
Keyword(s):  
Integrated Circuit ◽  
Degrees Of Freedom ◽  
Large Range ◽  
Topology Design ◽  
Spatial Density ◽  
Integrated Circuit Fabrication ◽  
Circuit Fabrication ◽  
Motion Range ◽  
Large Motion ◽  
Cross Axis

Compared with the traditional rigid mechanism, the flexible mechanism has more advantages, which play an important role in critical situations such as microsurgery, IC (integrated circuit) fabrication/detection, and some precision operating environment. Especially, there is an increasing need for 3-DOF (degrees-of-freedom) compliant translational micro-platform (CTMP) providing good performance characteristics with large motion range, low cross coupling, and high spatial density. Decoupled topology design of the CTMP can easily realize these merits without increasing the difficulty of controlling. This paper proposes a new three DOF compliant hybrid micromanipulator which have large range of motion up to 100 μm × 100 μm × 100 μm in the direction in the dimension of 90 mm × 90 mm × 50 mm, smaller cross-axis coupling (the max coupling only 2.5%) than the initial XY compliant platform in XY axial.

A 3-DOF Translational Compliant Parallel Manipulator Based on Flexure Motion

2009 ◽  
Author(s):  
Guangbo Hao ◽  
Xianwen Kong
Keyword(s):  
Range Of Motion ◽  
Parallel Manipulator ◽  
Large Range ◽  
Parallel Manipulators ◽  
Mathematic Modeling ◽  
Ultra Precision ◽  
Cross Axis ◽  
Force Displacement

This paper presents a novel class of 3-DOF translational compliant parallel manipulators (CPMs) based on flexure motion. The analytic mathematic modeling of CPMs is first developed. The analysis of CPMs is then implemented. It is shown that the proposed CPMs have many characteristics such as large range of motion, negligible cross-axis coupling, actuator complete isolation, and no loss motion and no rotational yaw. The inverse relationships of force-displacement of the 3-DOF CPM are further derived to calculate the input forces required for generating a specified path. In addition, the 3-DOF CPM can also be turned into a 2-DOF CPM. This work lays the foundation for the development of new spatial CPMs based on flexure motions for applications such as ultra precision manipulation.

A 2-legged XY parallel flexure motion stage with minimised parasitic rotation

2014 ◽  
Vol 228 (17) ◽  
pp. 3156-3169 ◽  
Author(s):  
Guangbo Hao
Keyword(s):  
Finite Element Analysis ◽  
Finite Element ◽  
Parallel Manipulator ◽  
Parallel Manipulators ◽  
Design Approach ◽  
Analytical Models ◽  
Geometrical Parameters ◽  
Element Analysis ◽  
Motion Range ◽  
Cross Axis

XY compliant parallel manipulators (aka XY parallel flexure motion stages) have been used as diverse applications such as atomic force microscope scanners due to their proved advantages such as eliminated backlash, reduced friction, reduced number of parts and monolithic configuration. This paper presents an innovative stiffness centre based approach to design a decoupled 2-legged XY compliant parallel manipulator in order to better minimise the inherent parasitic rotation and have a more compact configuration. This innovative design approach makes all of the stiffness centres, associated with the passive prismatic (P) modules, overlap at a point that all of the applied input forces can go through. A monolithic compact and decoupled XY compliant parallel manipulator with minimised parasitic rotation is then proposed using the proposed design approach based on a 2-PP kinematically decoupled translational parallel manipulator. Its load–displacement and motion range equations are derived, and geometrical parameters are determined for a specified motion range. Finite element analysis comparisons are also implemented to verify the analytical models with analysis of the performance characteristics including primary stiffness, cross-axis coupling, parasitic rotation, input and output motion difference and actuator nonisolation effect. Compared with the existing XY compliant parallel manipulators obtained using 4-legged mirror-symmetric constraint arrangement, the proposed XY compliant parallel manipulators based on stiffness centre approach mainly benefits from fewer legs resulting in reduced size, simpler modelling as well as smaller lost motion. Compared with existing 2-legged designs with the conventional arrangement, the present design has smaller parasitic rotation, which has been proved from the finite element analysis results.

Design and Analysis of New Large-Range XY Compliant Parallel Micromanipulators

2014 ◽  
Author(s):  
Jingjun Yu ◽  
Zhenguo Li ◽  
Dengfeng Lu ◽  
Guanghua Zong ◽  
Guangbo Hao
Keyword(s):  
Matrix Models ◽  
Mirror Symmetry ◽  
Initial Model ◽  
Element Analysis ◽  
Compliance Matrix ◽  
Parasitic Motion ◽  
Motion Range ◽  
Large Motion ◽  
Symmetry Structure ◽  
Cross Axis

The need for a compliant parallel micromanipulator (CPM) providing large motion range and high precision is increasing. Existing CPMs vary in constraint configurations and therefore it is necessary to verify/compare their characteristics. This paper compares three kinds of typical over-constrained CPMs, and derives their theoretical compliance matrix models pointing out constraint characteristics of the three kinematic configurations. Then the three CPMs are analyzed with FEA (finite element analysis), and results illustrate that the theoretical compliance matrix models are close to their FEA models. Moreover, cross-axis coupling along two motion axes (X&Y), parasitic motion and compliance fluctuation of motion stages are described in details. Through analyzing the FEA results, we present an improved CPM with a mirror-symmetry structure and redundant-constraint characteristic which can effectively constrain in-plane yaw and cross-axis coupling. It is shown that the improved CPM presented in this paper has a series of merits: large motion range up to 10mm×10mm in the dimension of 311mm×311mm×24mm, small compliance fluctuation (only 37.32% of that of the initial model), a smaller cross-axis coupling (only 24.39% of that of the initial model generated by a single-axis 5mm driving), a smaller in-plane parasitic yaw (only 53.57% of that of the initial model generated by double-axis 5mm driving).

Design of a Large Range XY Nanopositioning System

2010 ◽  
Author(s):  
Shorya Awtar ◽  
Gaurav Parmar
Keyword(s):  
Physical System ◽  
Large Range ◽  
Test Results ◽  
Flexure Mechanism ◽  
Motion Range ◽  
Parallel Kinematic ◽  
Large Motion ◽  
The Individual ◽  
High Degree ◽  
Motion Quality

Achieving large motion range (> 1 mm) along with nanometric motion quality (< 10 nm), simultaneously, has been a key challenge in nanopositioning systems. Practical limitations associated with the individual physical components (flexure bearing, actuators, and sensors) and their integration, particularly in the case of multi-axis systems, have restricted the range of current nanopositioning systems to about 100 μm. This paper presents a novel physical system layout, with a parallel-kinematic XY flexure mechanism at its heart, that provides a high degree of decoupling between the two motion axes by avoiding geometric over-constraints, provides actuator isolation that allows the use of large-stroke single-axis actuators, and enables a complementary end-point sensing scheme that employs commonly available sensors. These attributes help achieve an unprecedented 10 mm × 10 mm motion range in the proposed nanopositioning system. Having overcome the physical system design challenges, a dynamic model of proposed nanopositioning system is created and verified via system identification methods. In particular, dynamic non-linearities associated with the large displacements of the flexure mechanism and resulting controls challenges are identified. The physical system is fabricated, assembled, and tested to validate its simultaneous large range and nanometric motion capabilities. Preliminary closed-loop test results, which highlight the potential of this new design configuration, are presented.

Novel XY Compliant Parallel Manipulators for Large Displacement Translation With Enhanced Stiffness

2010 ◽  
Author(s):  
Guangbo Hao ◽  
Xianwen Kong
Keyword(s):  
Range Of Motion ◽  
Building Block ◽  
Parallel Manipulator ◽  
Large Range ◽  
Parallel Manipulators ◽  
Large Displacement ◽  
Analytical Models ◽  
The Novel ◽  
Out Of Plane ◽  
Error Motion

A novel XY compliant parallel manipulator (CPM) and a spatial double three-beam module both with distributed compliance are first proposed for large range of translation. Then, an improved XY CPM is proposed by combining the above XY CPM and a spatial double three-beam module in parallel. The normalized analytical models are further presented for the novel XY CPM, double three-beam module and improved XY CPM. It is shown that the improved XY CPM has the following merits: (1) large range of motion, constrained parasitic error motion, output-decoupling, maximal actuation isolation and minimal lost motion; and (2) large out-of-plane stiffness and no friction with base. The improved XY CPM may also be used as a building block to construct new spatial CPMs.

Design of a Large Range XY Nanopositioning System

2013 ◽  
Vol 5 (2) ◽  
Author(s):  
Shorya Awtar ◽  
Gaurav Parmar
Keyword(s):  
Physical System ◽  
Large Range ◽  
Test Results ◽  
Flexure Mechanism ◽  
Motion Range ◽  
Parallel Kinematic ◽  
Large Motion ◽  
The Individual ◽  
High Degree ◽  
Motion Quality

Achieving large motion range (>1 mm) along with nanometric motion quality (<10 nm) simultaneously has been a key challenge in nanopositioning systems. Practical limitations associated with the individual physical components (bearing, actuators, and sensors) and their integration, particularly in the case of multi-axis systems, have restricted the range of currently available nanopositioning systems to approximately 100 μm per axis. This paper presents a novel physical system layout, comprising a bearing, actuators, and sensors, that enables large range XY nanopositioning. The bearing is based on a parallel-kinematic XY flexure mechanism that provides a high degree of geometric decoupling between the two motion axes by avoiding geometric over-constraint, provides actuator isolation that allows the use of large-stroke single-axis actuators, and enables a complementary end-point sensing scheme using commonly available sensors. These attributes help achieve 10 mm × 10 mm motion range in the proposed nanopositioning system. Having overcome the physical system design challenges, a dynamic model of the proposed nanopositioning system is created and verified via system identification. In particular, dynamic nonlinearities associated with the large displacements of the flexure mechanism and resulting controls challenges are identified. The physical system is fabricated, assembled, and tested to validate its simultaneous large range and nanometric motion capabilities. Preliminary closed-loop test results, which highlight the potential as well as pending challenges associated with this new design configuration, are presented.

Design and Modeling of a Large-Range Modular XYZ Compliant Parallel Manipulator Using Identical Spatial Modules

2012 ◽  
Vol 4 (2) ◽  
Author(s):  
Guangbo Hao ◽  
Xianwen Kong
Keyword(s):  
Parallel Manipulator ◽  
Large Range ◽  
Parallel Manipulators ◽  
Analytical Models ◽  
Parameter Determination ◽  
Design Parameters ◽  
Element Analysis ◽  
Characteristics Analysis ◽  
Motion Range ◽  
Precision Motion

To meet the need for large-range high-precision motion stages, a design methodology of XYZ compliant parallel manipulators (CPMs) is introduced at first. A spatial double four-beam module and a compliant P (prismatic) joint, composed of two spatial double four-beam modules, are then proposed. Starting from a 3-PPPR (R: revolute) translational parallel manipulator, a large-range modular XYZ CPM with identical spatial modules is constructed using the proposed design approach. Normalized analytical models for the large-range modular XYZ CPM are further presented. As a case study, a modular XYZ CPM with a motion range of 10 mm × 10 mm × 10 mm along the positive X-, Y-, and Z-axes is presented in detail, covering the geometrical parameter determination, performance characteristics analysis, buckling check, and actuation force check. The analytical models are compared with the finite element analysis (FEA) models. Finally, the dynamics consideration, manufacturability, and merits are discussed. It is shown that the proposed large-range modular XYZ CPM has the following main merits compared with existing designs: (1) large range of motion up to 20 mm × 20 mm × 20 mm and (2) reduced number of design parameters through the use of identical spatial modules, although the manufacturability is a challenging issue.

An XYZ Parallel Kinematic Flexure Mechanism With Geometrically Decoupled Degrees of Freedom

2011 ◽  
Author(s):  
Shorya Awtar ◽  
John Ustick ◽  
Shiladitya Sen
Keyword(s):  
Degrees Of Freedom ◽  
Element Analysis ◽  
Motion Direction ◽  
Form Analysis ◽  
Flexure Mechanism ◽  
Non Linear ◽  
Decoupled Motion ◽  
Motion Range ◽  
Parallel Kinematic ◽  
Cross Axis

We present the constraint-based design of a novel parallel kinematic flexure mechanism that provides highly decoupled motions along the three translational directions (X, Y, and Z) and high stiffness along the three rotational directions (θx, θy, and θz). The geometric decoupling ensures large motion range along each translational direction and enables integration with large-stroke ground-mounted linear actuators or generators, depending on the application. The proposed design, which is based on a systematic arrangement of multiple rigid stages and parallelogram flexure modules, is analyzed via non-linear finite element analysis. A proof-of-concept prototype of the flexure mechanism is fabricated to validate its large range and decoupled motion capability. The analyses as well as the hardware demonstrate an XYZ motion range of 10 mm × 10 mm × 10 mm. Over this motion range, the non-linear FEA predicts a cross-axis error of less than 3%, parasitic rotations less than 2 mrad, less than 4% lost motion, actuator isolation less than 1.5%, and no perceptible motion direction stiffness variation. Ongoing work includes non-linear closed-form analysis and experimental measurement of these error motion and stiffness characteristics.

An XYZ Parallel-Kinematic Flexure Mechanism With Geometrically Decoupled Degrees of Freedom

2012 ◽  
Vol 5 (1) ◽  
Author(s):  
Shorya Awtar ◽  
John Ustick ◽  
Shiladitya Sen
Keyword(s):  
Degrees Of Freedom ◽  
Finite Elements Analysis ◽  
Motion Direction ◽  
Flexure Mechanism ◽  
Nonlinear Finite Elements ◽  
Decoupled Motion ◽  
Motion Range ◽  
Stiffness Variation ◽  
Parallel Kinematic ◽  
Cross Axis

A novel parallel-kinematic flexure mechanism that provides highly decoupled motions along the three translational directions (X, Y, and Z) and high stiffness along the three rotational directions (θx, θy, and θz) is presented. Geometric decoupling ensures large motion range along each translational direction and enables integration with large-stroke ground-mounted linear actuators or generators, depending on the application. The proposed design, which is based on a systematic arrangement of multiple rigid stages and parallelogram flexure modules, is analyzed via nonlinear finite elements analysis (FEA). A proof-of-concept prototype is fabricated to validate the predicted large range and decoupled motion capabilities. The analysis and the hardware prototype demonstrate an XYZ motion range of 10 mm × 10 mm × 10 mm. Over this motion range, the nonlinear FEA predicts cross-axis errors of less than 7.8%, parasitic rotations less than 10.8 mrad, less than 14.4% lost motion, actuator isolation better than 1.5%, and no perceptible motion direction stiffness variation.

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