Design and simulation of a MEMS MIM capacitive pressure sensor with high sensitivity in low pressure range

2021 ◽  
Vol 0 (0) ◽  
Author(s):  
Hamid Reza Ansari ◽  
Zoheir Kordrostami
Keyword(s):  
Pressure Sensor ◽  
Dielectric Layer ◽  
Pressure Range ◽  
High Sensitivity ◽  
Low Pressure ◽  
Air Gap ◽  
Capacitive Pressure Sensor ◽  
Aluminium Nitrate ◽  
Mems Sensor ◽  
Capacitive Mems

Abstract In this paper, the improvement of the sensitivity of a capacitive MEMS pressure sensor is investigated. The proposed spring for the sensor can increase the sensitivity. Silicon is used as the substrate and gold and aluminium nitrate are used as the diaphragm and the dielectric layer, respectively. The dimensions of the diaphragm are 150 µm × 150 µm, which is suspended by four springs. The air gap between the diaphragm and the top electrode is 1.5 µm. The proposed structure is an efficient sensor for the pressures in the range of 1–20 kPa. By using the proposed design, the sensitivity of the MEMS sensor in 18 kPa has improved to 663 (× 10−3 pF/kPa).

A porous and air gap elastomeric dielectric layer for wearable capacitive pressure sensor with high sensitivity and a wide detection range

2020 ◽  
Vol 8 (33) ◽  
pp. 11468-11476
Author(s):  
Wei Li ◽  
Xin Jin ◽  
Yide Zheng ◽  
Xudong Chang ◽  
Wenyu Wang ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Dielectric Layer ◽  
High Sensitivity ◽  
Capacitive Sensor ◽  
Air Gap ◽  
Capacitive Pressure Sensor ◽  
Detection Range ◽  
Highly Porous

Capacitive sensor combining highly porous PDMS and rough polypyrrole electrodes improves the device range and sensitivity.

scholarly journals Highly-Sensitive Textile Pressure Sensors Enabled by Suspended-Type All Carbon Nanotube Fiber Transistor Architecture

Micromachines ◽  
2020 ◽  
Vol 11 (12) ◽  
pp. 1103
Author(s):  
Jae Sang Heo ◽  
Keon Woo Lee ◽  
Jun Ho Lee ◽  
Seung Beom Shin ◽  
Jeong Wan Jo ◽  
...  
Keyword(s):  
Carbon Nanotube ◽  
Pressure Sensor ◽  
Pressure Range ◽  
Pressure Sensors ◽  
High Sensitivity ◽  
Low Pressure ◽  
Electronic Textiles ◽  
Carbon Nanotube Fiber ◽  
Cnt Fiber ◽  
Walled Carbon Nanotubes

Among various wearable health-monitoring electronics, electronic textiles (e-textiles) have been considered as an appropriate alternative for a convenient self-diagnosis approach. However, for the realization of the wearable e-textiles capable of detecting subtle human physiological signals, the low-sensing performances still remain as a challenge. In this study, a fiber transistor-type ultra-sensitive pressure sensor (FTPS) with a new architecture that is thread-like suspended dry-spun carbon nanotube (CNT) fiber source (S)/drain (D) electrodes is proposed as the first proof of concept for the detection of very low-pressure stimuli. As a result, the pressure sensor shows an ultra-high sensitivity of ~3050 Pa−1 and a response/recovery time of 258/114 ms in the very low-pressure range of <300 Pa as the fiber transistor was operated in the linear region (VDS = −0.1 V). Also, it was observed that the pressure-sensing characteristics are highly dependent on the contact pressure between the top CNT fiber S/D electrodes and the single-walled carbon nanotubes (SWCNTs) channel layer due to the air-gap made by the suspended S/D electrode fibers on the channel layers of fiber transistors. Furthermore, due to their remarkable sensitivity in the low-pressure range, an acoustic wave that has a very tiny pressure could be detected using the FTPS.

Flexible Capacitive Pressure Sensors with Micro-Patterned Porous Dielectric Layer for Wearable Electronics

2022 ◽  
Author(s):  
Jing Wang ◽  
Longwei Li ◽  
Lanshuang Zhang ◽  
Panpan Zhang ◽  
Xiong Pu
Keyword(s):  
Pressure Sensor ◽  
Flexible Electronics ◽  
Dielectric Layer ◽  
Pressure Sensors ◽  
High Sensitivity ◽  
Capacitive Sensor ◽  
Human Motion ◽  
Capacitive Pressure Sensor ◽  
Wearable Electronics ◽  
Emulsified Water

Abstract Highly sensitive soft sensors play key roles in flexible electronics, which therefore have attracted much attention in recent years. Herein, we report a flexible capacitive pressure sensor with high sensitivity by using engineered micro-patterned porous polydimethylsiloxane (PDMS) dielectric layer through an environmental-friendly fabrication procedure. The porous structure is formed by evaporation of emulsified water droplets during PDMS curing process, while the micro-patterned structure is obtained via molding on sandpaper. Impressively, this structure renders the capacitive sensor with a high sensitivity up to 143.5 MPa-1 at the pressure range of 0.068~150 kPa and excellent anti-fatigue performance over 20,000 cycles. Meanwhile, the sensor can distinguish different motions of the same person or different people doing the same action. Our work illustrates the promising application prospects of this flexible pressure sensor for the security field or human motion monitoring area.

Linearization of Characteristic Response of a Capacitive MEMS Pressure Sensor by Patterning the Dielectric Layer

2020 ◽  
Author(s):  
Nadia Ebrahimpour Tolouei ◽  
Mohammad Shavezipur
Keyword(s):  
Pressure Sensor ◽  
Dielectric Layer ◽  
Contact Region ◽  
Quantitative Measure ◽  
Capacitive Pressure Sensor ◽  
Contact Mode ◽  
Insulating Layer ◽  
Capacitance Pressure ◽  
Capacitive Mems ◽  
Novel Design

Abstract The present work introduces a novel design that linearizes the characteristic capacitance-pressure (C-P) response of the pressure sensor in contact mode. The design relies on patterning the insulating (dielectric) layer that separates the two electrodes of the device when the device is in contact mode. Since the capacitance is inversely proportional to the gap between the electrodes and the dielectric constant of the insulating layer is several times more than that of air (or vacuum), the contact region of the two electrodes makes more significant contribution to the overall capacitance of the system. Therefore, if the dielectric layer is properly patterned, the shape of C-P response can be controlled. In this work, we focus on linearity of the sensor response, and design and optimize dielectric pattern to achieve the highest linearity. Finite element simulations are used to demonstrate the applicability of the design concept. Different sensor designs are modeled and simulated using ANSYS® Multiphysics solver and their responses are compared to that of a conventional capacitive pressure sensor. Coefficient of linear correlation between pressure and capacitance is used as a quantitative measure for improvement of linearity. The simulation results show that the linearity of the C-P response improves from 0.930 in a 600 μm-diameter conventional design to 0.978 for a sensor with patterned dielectric layer. Moreover, a smaller sensor with 300 μm diameter display linearity of 0.999 over a 1.25 MPa – 5.0 MPa pressure range.

scholarly journals Ultra-Sensitive Flexible Pressure Sensor Based on Microstructured Electrode

Sensors ◽  
2020 ◽  
Vol 20 (2) ◽  
pp. 371 ◽  
Author(s):  
Mengmeng Li ◽  
Jiaming Liang ◽  
Xudong Wang ◽  
Min Zhang
Keyword(s):  
Pressure Sensor ◽  
Dielectric Layer ◽  
Pressure Sensors ◽  
High Sensitivity ◽  
Capacitive Sensor ◽  
Duty Ratio ◽  
Capacitive Pressure Sensor ◽  
Element Analysis ◽  
Sequential Coupling ◽  
Flexible Pressure Sensors

Flexible pressure sensors with a high sensitivity in the lower zone of a subtle-pressure regime has shown great potential in the fields of electronic skin, human–computer interaction, wearable devices, intelligent prosthesis, and medical health. Adding microstructures on the dielectric layer on a capacitive pressure sensor has become a common and effective approach to enhance the performance of flexible pressure sensors. Here, we propose a method to further dramatically increase the sensitivity by adding elastic pyramidal microstructures on one side of the electrode and using a thin layer of a dielectric in a capacitive sensor. The sensitivity of the proposed device has been improved from 3.1 to 70.6 kPa−1 compared to capacitive sensors having pyramidal microstructures in the same dimension on the dielectric layer. Moreover, a detection limit of 1 Pa was achieved. The finite element analysis performed based on electromechanical sequential coupling simulation for hyperelastic materials indicates that the microstructures on electrode are critical to achieve high sensitivity. The influence of the duty ratio of the micro-pyramids on the sensitivity of the sensor is analyzed by both simulation and experiment. The durability and robustness of the device was also demonstrated by pressure testing for 2000 cycles.

A highly sensitive and flexible capacitive pressure sensor based on a micro-arrayed polydimethylsiloxane dielectric layer

2018 ◽  
Vol 6 (48) ◽  
pp. 13232-13240 ◽  
Author(s):  
Longquan Ma ◽  
Xingtian Shuai ◽  
Yougen Hu ◽  
Xianwen Liang ◽  
Pengli Zhu ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Dielectric Layer ◽  
Sandwich Structure ◽  
High Sensitivity ◽  
Capacitive Pressure Sensor ◽  
Pdms Substrate ◽  
Highly Sensitive ◽  
Flexible Pressure Sensor

A flexible pressure sensor with high sensitivity has been proposed which consists of a typical sandwich structure by integrating a PDMS substrate with a micro-arrayed PDMS dielectric layer.

Flexible M-Tooth Hybrid Micro-Structure Based Capacitive Pressure Sensor with High Sensitivity and Wide Sensing Range

2021 ◽  
pp. 1-1
Author(s):  
Valliammai Palaniappan ◽  
Masoud Panahi ◽  
Dinesh Maddipatla ◽  
Xingzhe Zhang ◽  
Simin Masihi ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
High Sensitivity ◽  
Capacitive Pressure Sensor ◽  
Micro Structure ◽  
Sensing Range
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