Design, Fabrication, and Characterization of Metal Embedded Microphotonic Sensors

2008 ◽  
Vol 130 (3) ◽  
Author(s):  
Xugang Zhang ◽  
Hongrui Jiang ◽  
Xiaochun Li
Keyword(s):  
Electromagnetic Interference ◽  
Manufacturing Systems ◽  
Free Spectral Range ◽  
Ring Resonators ◽  
Manufacturing Processes ◽  
Recent Developments ◽  
Fabrication And Characterization ◽  
Photonic Sensors ◽  
Manufacturing Environments

Recent developments in integrated microphotonics have led to unprecedented potential toward robust sensor enhancements for manufacturing systems. These micron-sized subwavelength structured photonic sensors could allow critical thermomechanical phenomena in manufacturing processes to be monitored while offering immunity to electromagnetic interference, resistance to hostile environments, multiplexing capabilities, and high rates of data collection. To implement these novel sensors into real manufacturing processes, the microphotonic sensors can be embedded at critical locations in metallic structures, which are heavily used in hostile manufacturing environments. This paper presents the study of design, fabrication, and characterization of integrated microring sensors. Various thin film optical materials were studied and single ring resonators were designed. A new approach to fabricate metal embedded microring sensors was developed. Metal embedded optical microring temperature sensors were characterized. The Q factor of the metal embedded microring sensors was measured to be around 2000, while the free spectral range was about 5.2nm. The temperature sensitivity of the metal embedded microring sensor was 24.2pm∕°C.

Design and Fabrication of Micro Photonic Sensors for Manufacturing

2007 ◽  
Author(s):  
Xugang Zhang ◽  
Xiaochun Li
Keyword(s):  
Embedded Sensors ◽  
Ring Resonators ◽  
Manufacturing Processes ◽  
Metallic Structures ◽  
New Approach ◽  
Free Spectrum ◽  
Fundamental Understanding ◽  
Single Ring ◽  
Photonic Sensors ◽  
Manufacturing Environments

Micron-sized subwavelength structured photonic sensors could allow critical thermo-mechanical phenomena in manufacturing processes to be monitored, while offering opportunities for fundamental understanding and better control of manufacturing processes. To implement these novel sensors into real manufacturing processes, the micro photonic sensors can be embedded at critical locations in metallic structures, which are still heavily used in hostile manufacturing environments. This paper presents the study of design, fabrication, and testing of integrated microring sensors. Various thin film optical materials were studied. Single ring resonators were designed. A new approach to fabricate metal embedded microring sensors was developed. Sensors fabricated on silicon wafers were tested and the Q factor was measured to be around 2000, the free spectrum range (FSR) was about 5 nm. Preliminary results of metal embedded sensors are also presented.

scholarly journals Near-Infrared All-Silicon Photodetectors

2012 ◽  
Vol 2012 ◽  
pp. 1-6 ◽  
Author(s):  
M. Casalino ◽  
G. Coppola ◽  
M. Iodice ◽  
I. Rendina ◽  
L. Sirleto
Keyword(s):  
Reverse Bias ◽  
Near Infrared ◽  
Free Spectral Range ◽  
Complementary Metal Oxide Semiconductor ◽  
Oxide Semiconductor ◽  
Integrated Devices ◽  
Fabry Perot ◽  
Fabrication And Characterization ◽  
Cavity Effect

We report the fabrication and characterization of all-silicon photodetectors at 1550 nm based on the internal photoemission effect. We investigated two types of structures: bulk and integrated devices. The former are constituted by a Fabry-Perot microcavity incorporating a Schottky diode, and their performance in terms of responsivity, free spectral range, and finesse was experimentally calculated in order to prove an enhancement in responsivity due to the cavity effect. Results show a responsivity peak of about 0.01 mA/W at 1550 nm with a reverse bias of 100 mV. The latter are constituted by a Schottky junction placed transversally to the optical field confined into the waveguide. Preliminary results show a responsivity of about 0.1 mA/W at 1550 nm with a reverse bias of 1 V and an efficient behaviour in both C and L bands. Finally, an estimation of bandwidth for GHz range is deduced for both devices. The technological steps utilized to fabricate the devices allow an efficiently monolithic integration with complementary metal-oxide semiconductor (CMOS) compatible structures.

Electromagnetic Field Shielding Fabrics with Increased Comfort Properties

2013 ◽  
Vol 677 ◽  
pp. 161-168 ◽  
Author(s):  
Veronika Safarova ◽  
Jiří Militký
Keyword(s):  
Electromagnetic Interference ◽  
Electronic Devices ◽  
Health Issues ◽  
Shielding Effectiveness ◽  
Electronic Industry ◽  
Metal Grid ◽  
Shielding Properties ◽  
Fabrication And Characterization ◽  
Electromagnetic Signals

The expansion of the electronic industry and the extensive use of electronic equipment in communications, computations, automations, biomedicine, space, and other purposes have led to problems such as electromagnetic interference of electronic devices and health issues. For reasons given above, a demand for protection of human being, sensitive electronic and electrotechnic appliances against undesirable influence electromagnetic signals and troublesome charges raised. This paper presents the present state of a fabrication and characterization of multifunctional metal hybrid fabrics with increased resistivity to electromagnetic smog at conserving basic properties of textile structures designated for clothing purposes. The parameters influencing electromagnetic (EM) shielding properties of the hybrid fabrics were investigated. It was shown that the EM shielding effectiveness of the fabrics could be tailored by modifying the metal content, metal grid size and geometry. Furthermore, correlation between electrical properties and EM shielding effectiveness and comfort properties was studied.

scholarly journals Temperature Sensor Based on Periodically Tapered Optical Fibers

Sensors ◽  
2021 ◽  
Vol 21 (24) ◽  
pp. 8358
Author(s):  
Bartlomiej Guzowski ◽  
Mateusz Łakomski
Keyword(s):  
Linear Function ◽  
Optical Fibers ◽  
Spectral Range ◽  
Temperature Sensor ◽  
Simple Structure ◽  
Free Spectral Range ◽  
Temperature Response ◽  
Temperature Range ◽  
Fabrication And Characterization

In this paper, the fabrication and characterization of a temperature sensor based on periodically tapered optical fibers (PTOF) are presented. The relation between the geometry of the sensors and sensing ability was investigated in order to find the relatively simple structure of a sensor. Four types of PTOF structures with two, four, six and eight waists were manufactured with the fusion splicer. For each PTOF type, the theoretical free spectral range (FSR) was calculated and compared with measurements. The experiments were conducted for a temperature range of 20–70 °C. The results proved that the number of the tapered regions in PTOF is crucial, because some of the investigated structures did not exhibit the temperature response. The interference occurring inside the structures with two and four waists was found be too weak and, therefore, the transmission dip was hardly visible. We proved that sensors with a low number of tapered regions cannot be considered as a temperature sensor. Sufficiently more valuable results were obtained for the last two types of PTOF, where the sensor’s sensitivity was equal to 0.07 dB/°C with an excellent linear fitting (R2 > 0.99). The transmission dip shift can be described by a linear function (R2 > 0.97) with a slope α > 0.39 nm/°C.

Fabrication and Characterization of Polyoxometalate based Nano-hybrids: Evaluation of their role in Biological Activity

2019 ◽  
Vol 35 (4) ◽  
pp. 475-484
Author(s):  
SHIVA ARUN ◽  
◽  
PRABHA BHARTIYA ◽  
AMREEN NAZ ◽  
SUDHEER RAI ◽  
...  
Keyword(s):  
Biological Activity ◽  
Fabrication And Characterization

Fabrication and Characterization of Microcantilever for Detection of Vibration Sensation in Tactile Sensing

2019 ◽  
Vol 139 (11) ◽  
pp. 375-380
Author(s):  
Harutoshi Takahashi ◽  
Yuta Namba ◽  
Takashi Abe ◽  
Masayuki Sohgawa
Keyword(s):  
Tactile Sensing ◽  
Fabrication And Characterization
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