Adhesion and Pull-Off Forces for Polysilicon MEMS Surfaces Using the Sub-Boundary Lubrication Model

2002 ◽  
Vol 125 (1) ◽  
pp. 193-199 ◽  
Author(s):  
Allison Y. Suh ◽  
Andreas A. Polycarpou

Miniature devices including MEMS and the head disk interface in magnetic storage often include very smooth surfaces, typically having root-mean-square roughness, σ of the order of 10 nm or less. When such smooth surfaces contact, or come into proximity of each other, either in dry or wet environments, then strong intermolecular (adhesive) forces may arise. Such strong intermolecular forces may result in unacceptable and possibly catastrophic adhesion, stiction, friction and wear. In the present paper, a model termed sub-boundary lubrication (SBL) adhesion model is used to calculate the adhesion forces, and an elastic-plastic model is used to calculate the contact forces at typical MEMS interfaces. Several levels of surface roughness are investigated representing polished and as-deposited polysilicon films that are typically found in MEMS. The SBL adhesion model reveals the significance of the surface roughness on the adhesion and pull-off forces as the surfaces become smoother. The validity of using the SBL adhesion model to estimate the pull-off forces in miniature systems is further supported by direct comparison with experimental pull-off force measurements performed on silicon and gold interfaces. Finally, the significance of the interfacial forces as relate to the reliability of MEMS interfaces is discussed.

2004 ◽  
Vol 126 (2) ◽  
pp. 334-341 ◽  
Author(s):  
Sung-Chang Lee ◽  
Andreas A. Polycarpou

A quasi-dynamic adhesion model is used to calculate the intermolecular adhesion forces present in ultra low flying Head Disk Interfaces (HDI’s). The model is a continuum-based micromechanics model that accounts for realistic surfaces with roughness, molecularly thin lubricants, and is valid under both static and dynamic sliding conditions. Several different levels of surface roughness are investigated ranging from extremely smooth surfaces having a standard deviation of surface heights σ=2 Å to rougher interfaces with several nanometer roughness. It is found that when the flying-height is greater than 5 nm, there are no significant adhesive forces, whereas for flying-heights less than 5 nm, adhesion forces increase sharply, which can be catastrophic to the reliability of low flying HDI’s. In addition to roughness, the apparent area of contact between the flying recording slider and the magnetic disk is also found to significantly affect the magnitude of the adhesion forces. The adhesion model is validated by direct comparisons with adhesion “pull-off” force measurements performed using an Atomic Force Microscope with controlled probe tip areas and magnetic disks having different lubricant thickness.


1998 ◽  
Vol 120 (2) ◽  
pp. 296-303 ◽  
Author(s):  
A. A. Polycarpou ◽  
Izhak Etsion

A model for calculating the static friction coefficient of contacting real (rough) surfaces in the presence of very thin liquid films (sub-boundary lubrication) is developed. The liquid has a very high affinity for the surfaces and its thickness is of the order of the surface roughness average. An extension of the Greenwood and Williamson (GW) asperity model and an improved Derjaguin, Muller and Toporov (DMT) adhesion model are utilized for calculating the contact and adhesion forces, respectively. The effects of the liquid film thickness and the surface topography on the static friction coefficient are investigated. A critical film thickness is found above which the friction coefficient increases sharply. The critical thickness depends on the surface roughness and the external normal load. This phenomenon is more profound for very smooth surfaces and small normal loads, in agreement with published experimental work on magnetic hard disk interfaces.


2001 ◽  
Vol 34 (2) ◽  
pp. 105-267 ◽  
Author(s):  
Deborah Leckband ◽  
Jacob Israelachvili

0. Abbreviations 1061. Introduction: overview of forces in biology 1081.1 Subtleties of biological forces and interactions 1081.2 Specific and non-specific forces and interactions 1131.3 van der Waals (VDW) forces 1141.4 Electrostatic and ’double-layer‘ forces (DLVO theory) 1221.4.1 Electrostatic and double-layer interactions at very small separation 1261.5 Hydration and hydrophobic forces (structural forces in water) 1311.6 Steric, bridging and depletion forces (polymer-mediated and tethering forces) 1371.7 Thermal fluctuation forces: entropic protrusion and undulation forces 1421.8 Comparison of the magnitudes of the major non-specific forces 1461.9 Bio-recognition 1461.10 Equilibrium and non-equilibrium forces and interactions 1501.10.1 Multiple bonds in parallel 1531.10.2 Multiple bonds in series 1552. Experimental techniques for measuring forces between biological molecules and surfaces 1562.1 Different force-measuring techniques 1562.2 Measuring forces between surfaces 1612.3 Measuring force–distance functions, F(D) 1612.4 Relating the forces between different geometries: the ‘Derjaguin Approximation’ 1622.5 Adhesion forces and energies 1642.5.1 An example of the application of adhesion mechanics of biological adhesion 1662.6 Measuring forces between macroscopic surfaces: the surface forces apparatus (SFA) 1672.7 The atomic force microscope (AFM) and microfiber cantilever (MC) techniques 1732.8 Micropipette aspiration (MPA) and the bioforce probe (BFP) 1772.9 Osmotic stress (OS) and osmotic pressure (OP) techniques 1792.10 Optical trapping and the optical tweezers (OT) 1812.11 Other optical microscopy techniques: TIRM and RICM 1842.12 Shear flow detachment (SFD) measurements 1872.13 Cell locomotion on elastically deformable substrates 1893. Measurements of equilibrium (time-independent) interactions 1913.1 Long-range VDW and electrostatic forces (the two DVLO forces) between biosurfaces 1913.2 Repulsive short-range steric–hydration forces 1973.3 Adhesion forces due to VDW forces and electrostatic complementarity 2003.4 Attractive forces between surfaces due to hydrophobic interactions: membrane adhesion and fusion 2093.4.1 Hydrophobic interactions at the nano- and sub-molecular levels 2113.4.2 Hydrophobic interactions and membrane fusion 2123.5 Attractive depletion forces 2133.6 Solvation (hydration) forces in water: forces associated with water structure 2153.7 Forces between ‘soft-supported’ membranes and proteins 2183.8 Equilibrium energies between biological surfaces 2194. Non-equilibrium and time-dependent interactions: sequential events that evolve in space and time 2214.1 Equilibrium and non-equilibrium time-dependent interactions 2214.2 Adhesion energy hysteresis 2234.3 Dynamic forces between biomolecules and biomolecular aggregates 2264.3.1 Strengths of isolated, noncovalent bonds 2274.3.2 The strengths of isolated bonds depend on the activation energy for unbinding 2294.4 Simulations of forced chemical transformations 2324.5 Forced extensions of biological macromolecules 2354.6 Force-induced versus thermally induced chemical transformations 2394.7 The rupture of bonds in series and in parallel 2424.7.1 Bonds in series 2424.7.2 Bonds in parallel 2444.8 Dynamic interactions between membrane surfaces 2464.8.1 Lateral mobility on membrane surfaces 2464.8.2 Intersurface forces depend on the rate of approach and separation 2494.9 Concluding remarks 2535. Acknowledgements 2556. References 255While the intermolecular forces between biological molecules are no different from those that arise between any other types of molecules, a ‘biological interaction’ is usually very different from a simple chemical reaction or physical change of a system. This is due in part to the higher complexity of biological macromolecules and systems that typically exhibit a hierarchy of self-assembling structures ranging in size from proteins to membranes and cells, to tissues and organs, and finally to whole organisms. Moreover, interactions do not occur in a linear, stepwise fashion, but involve competing interactions, branching pathways, feedback loops, and regulatory mechanisms.


1989 ◽  
Vol 111 (2) ◽  
pp. 260-264 ◽  
Author(s):  
P. Lacey ◽  
A. A. Torrance ◽  
J. A. Fitzpatrick

Most previous studies of boundary lubrication have ignored the contribution of surface roughness to friction. However, recent work by Moalic et al. (1987) has shown that when asperity contacts can be modelled by a slip line field, there is a precise relation between the friction coefficient and the asperity slope. Here, it is shown that there is also a relation between the friction coefficient and the normal pressure for rough surfaces which can be predicted from a development of the slip line field model.


Sensors ◽  
2021 ◽  
Vol 21 (18) ◽  
pp. 6164
Author(s):  
Treesukon Treebupachatsakul ◽  
Siratchakrit Shinnakerdchoke ◽  
Suejit Pechprasarn

This paper provides a theoretical framework to analyze and quantify roughness effects on sensing performance parameters of surface plasmon resonance measurements. Rigorous coupled-wave analysis and the Monte Carlo method were applied to compute plasmonic reflectance spectra for different surface roughness profiles. The rough surfaces were generated using the low pass frequency filtering method. Different coating and surface treatments and their reported root-mean-square roughness in the literature were extracted and investigated in this study to calculate the refractive index sensing performance parameters, including sensitivity, full width at half maximum, plasmonic dip intensity, plasmonic dip position, and figure of merit. Here, we propose a figure-of-merit equation considering optical intensity contrast and signal-to-noise ratio. The proposed figure-of-merit equation could predict a similar refractive index sensing performance compared to experimental results reported in the literature. The surface roughness height strongly affected all the performance parameters, resulting in a degraded figure of merit for surface plasmon resonance measurement.


2016 ◽  
Vol 3 (10) ◽  
pp. 160248 ◽  
Author(s):  
X. Jin ◽  
B. Kasal

This study attempts to address the interpretation of atomic force microscopy (AFM) adhesion force measurements conducted on the heterogeneous rough surface of wood and natural fibre materials. The influences of wood surface roughness, tip geometry and wear on the adhesion force distribution are examined by cyclic measurements conducted on wood surface under dry inert conditions. It was found that both the variation of tip and surface roughness of wood can widen the distribution of adhesion forces, which are essential for data interpretation. When a common Si AFM tip with nanometre size is used, the influence of tip wear can be significant. Therefore, control experiments should take the sequence of measurements into consideration, e.g. repeated experiments with used tip. In comparison, colloidal tips provide highly reproducible results. Similar average values but different distributions are shown for the adhesion measured on two major components of wood surface (cell wall and lumen). Evidence supports the hypothesis that the difference of the adhesion force distribution on these two locations was mainly induced by their surface roughness.


2013 ◽  
Vol 734-737 ◽  
pp. 2492-2495
Author(s):  
Yong June Choi ◽  
Kyung Mun Kang ◽  
Hyung Ho Park

The post-annealing effects on the surface morphological changes of undoped and Al-doped ZnO (ZnO:Al) thin films deposited by atomic layer deposition (ALD) were investigated. The as-grown films were deposited by ALD at growth temperature of 200°C and also, post-annealing of the samples was accomplished at 300°C for 1 h under nitrogen atmosphere. The X-ray diffraction of the films was monitored to study the crystallinity of the films according to post-anneal. The field emission-scanning electron microscopy and atomic force microscopy were conducted to observe the surface morphological changes and measure the root-mean-square roughness of the films in order to analysis the post-annealing effects on the surface roughness of the films.


Author(s):  
Hartmut R. Fischer ◽  
Edwin R. M. Gelinck

The tendency of smooth surfaces to stick spontaneously to each other is becoming a serious problem, with: a) the increasing quality in surface finish for many components and systems, b) on miniaturization in mechanical components, and c) in demanded precision of positioning of parts in high-end equipment machines and systems. Surfaces tend to be made smoother in order to gain flatness or in order to fulfill the need for more precise and reproducible positioning of parts. Adhesion or even sticking of the surfaces is a major showstopper for these applications. There are several measures that can be taken in order to reduce spontaneous adhesion. Quantification of the effectiveness of the chosen solution is most often done using an AFM with probes varying from 1 nm to 8 micron of contact diameter. A serious disadvantage in measuring adhesion by sharp tips is the wear of the tips. Sharp tips wear easily, resulting in undefined contact areas. When the real area of contact is not well defined, the quantification of the adhesion force is not significant. In the current study results of AFM measurements from literature with different tip diameters of colloidal probes are compared with measurements we performed using AFM cantilevers with a plateau tip and using probes from large spheres using an alternative setup (UNAT). These methods give results that are in good agreement with values found in literature. Large contacting surface enhance the quality of the measured adhesion values. Another part of the study deals with a deliberately roughening of smooth surfaces to minimize (spontaneous) adhesion. Good agreement has been found with existing results. For the use of larger surfaces it is important that the surfaces to be tested are extremely clean. Particles on smooth surface do influence the measurements quite easily. Especially for larger areas, the possibility of encountering particles on the surface are more likely, when particles are present. For the measurements in this study a lot of care has been taken therefore to remove contamination: particles as well as contamination of organic origin.


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