Optical Waveguides In BenzoCyclobutene (BCB 4024–40) Polymer

2012 ◽  
Author(s):  
Mohd Haniff Ibrahim ◽  
Norazan Mohd Kassim ◽  
Abu Bakar Mohammad ◽  
Mee–Koy Chin ◽  
Shuh–Ying Lee

Proses fabrikasi dan pencirian bagi pandu gelombang optik mod tunggal yang berdasarkan bahan polimer sensitif cahaya, BenzoCyclobutene (BCB 4024–40) dibincangkan. Ketebalan filem polimer bagi pelbagai kelajuan putaran enapan dan indeks biasan polimer diukur menggunakan kaedah prisma gandingan. Pandu gelombang ini difabrikasi menggunakan kaedah fotolitografi dan punaran kimia basah di atas bahan kaca BK7 dan lapisan nipis SiO2 sebagai pelindung. Kehilangan pandu gelombang diukur menggunakan kaedah konvensional ‘cut back’ yang menghasilkan purata kehilangan sebanyak 3.5 dB/cm. Kata kunci: Polimer BenzoCyclobutene; kaedah putaran enapan; kaedah punaran kimia basah; prisma gandingan The fabrication and characterization processes of single mode optical waveguide based on photosensitive BenzoCyclobutene (BCB 4024–40) polymer are described. The polymer film thickness for various coating speed and refractive index are measured by the method of prism coupling. The waveguide is fabricated using the photolithography and chemical etching technique on BK7 glass substrate with a thin layer of SiO2 as cover. The waveguide loss is measured using the conventional cut back method which results on an average loss of 3.5 dB/cm. Key words: BenzoCyclobutene polymer; spin coating technique; chemical etching technique; prism coupling; cutback method

1991 ◽  
Vol 244 ◽  
Author(s):  
S. P. Wong ◽  
E. Y. B. Pun ◽  
W. T. Lam ◽  
P. S. Chung

ABSTRACTMulti-energy nitrogen implantation into thermally grown SiO2 on silicon substrates has been performed and the optical wave-guiding properties of this structure has been studied. The implantation energy used was in Ie range of 40 KeV to 150 keV, and the doses used were typically 2×1016 to 2×10−2. The energies and doses were chosen to achieve relatively flat implanted nitrogen profiles. It is found that optical waveguides can be formed when the implanted nitrogen concentration is sufficiently high. Both prism-coupling technique and end-fire coupling technique were used to test the implanted waveguides fabricated. Many m-lines including dark modes were observed by the prism-coupling method. This structure is found to be very stable against thermal annealing and there is no significant change observed in the waveguiding properties even after annealing at 1000 °C for four hours. The waveguide loss was found to be typically 0.6 dB/cm before annealing and can be further reduced to about 0.3 dB/cm after annealing.


2018 ◽  
Vol 17 (3) ◽  
pp. 10-12
Author(s):  
Mohd Haniff Ibrahim ◽  
Mohd Rashidi Salim ◽  
Muhammad Yusof Mohd Noor ◽  
Norazan Mohd Kassim

In this paper, graphene oxide (GO) was doped into SU-8 polymer to examine the functionalities of polymer waveguide material via dopant inclusion. In material preparation, step by step processes starting from cyclopentanone mixing will be explained. It is shown that doped material's refractive index can be tailored by having different weight percentage of GO. Finally, a single mode ridge waveguide loss of GO doped SU-8 has been characterized to be 1.9 dB/cm at 1550 nm wavelength.


2012 ◽  
Author(s):  
Ahmad Sharmi Abdullah ◽  
Amirjan Nawabjan ◽  
Norazan Mohd Kassim ◽  
Mohd Haniff Ibrahim ◽  
Mohamad Zahid Abdul Malek

Pandu gelombang optik jalur berasaskan bahan–bahan sol–gel organik–bukan organic (hybrid) direka, disimulasi dan dibentuk. Bahan–bahan sol–gel hybrid tersebut disediakan daripada vinyltriethoxysilane (VTES), tetraethoxysilane (TEOS) dan tetrabutoxytitanate (TTBu) malalui kaedah pemprosesan sol–gel. Pandu gelombang optik tersebut telah dibentuk di atas lapisan quartz menggunakan kaedah penyalutan berputar, lithografi langsung, dan goresan kimia basah. Beberapa lapisan sol telah dibentuk demi mendapatkan struktur pandu gelombang dengan ketebalan yang sesuai untuk laluan mod cahaya sebagaimana diperolehi daripada simulasi. Kebolehan pandu gelombang untuk memandu cahaya pada panjang gelombang 1550 nm telah dicirikan mengunakan kaedah direct end–face fiber butt–coupling. Struktur fizikal pandu gelombang tersebut telah diperhatikan melalui mikroskop berkuasa tinggi. Keputusan yang diperolehi menunjukkan bahawa bahan yang dicadangkan boleh digunakan dalam aplikasi pemanduan gelombang optik pada panjang gelombang 1550 nm. Simulasi menunjukkan bahawa pandu gelombang jalur satu mod dapat direalisasikan jika ketebalan dan kelebaran pandu gelombang tersebut berada pada suatu julat nilai tertentu. Julat nilai tersebut dapat diperolehi melalui pengawalan parameter–parameter penyalutan berputar dan pembentukan mikro. Kualiti keratan rentas yang baik juga diperhatikan telah diperolehi melalui kaedah pembelahan semulajadi. Kata kunci: Pemprosesan sol–gel; bahan organik–bukan organic; pandu gelombang jalur Ridge optical waveguides based on organic–inorganic (hybrid) sol–gel materials were designed, simulated and fabricated. The hybrid sol–gel materials were synthesized from vinyltriethoxysilane (VTES), tetraethoxysilane (TEOS) and tetrabutoxytitanate (TTBu) precursors by means of sol–gel processing technique. The optical waveguides were fabricated on quartz substrate using spin coating, direct photolithography, and wet chemical etching techniques. Multiple layers of sol were deposited so as to obtain waveguide structure with suitable thickness for mode propagation such as acquired from the simulation. Waveguiding ability of the ridge optical waveguides at 1550 nm wavelength was characterized using direct end–face fiber butt–coupling method. Physical structure of the waveguides was observed through high power microscope. Observation showed that the proposed material possesses the ability for waveguiding application at the wavelength of 1550 nm. Simulation showed that a single mode ridge optical waveguide could be realized provided that the structure thickness and width are within certain range. The range is attainable through proper control of spin coating and micropatterning parameters. Acceptable end–face quality resulted from natural cleaving process was also discovered. Key words: Sol–gel processing; organic–inorganic material; ridge optical waveguide


2012 ◽  
Vol 516 ◽  
pp. 580-584 ◽  
Author(s):  
Kozo Taguchi ◽  
Shinya Imanaka

In this paper, chemically etched axicon fibre was proposed for laser trapping of micro-objects dispersed in liquid. We fabricated axicon microlenses on a single-mode bare optical fibre using a selective chemical etching technique. The laser beam from a fibre axicon microlens was strongly focused and optical forces were sufficient to move microorganisms and biological cells without physical contact. From the experimental results, it was found that our proposed fibre axicon microlens is a promising tool for cell trapping and the apex angle of the chemically etched fibre axicon microlens is a very important parameter for laser trapping.


2015 ◽  
Vol 2015 (1) ◽  
pp. 000603-000608 ◽  
Author(s):  
Bruce Chou ◽  
William Vis ◽  
Ryuta Furuya ◽  
Venky Sundaram ◽  
Tummala Rao

This paper presents the modeling, design, fabrication, and characterization of ultra-low loss 3D optical waveguides integrated on a glass photonic substrate. A novel, single-step process was developed using moving mask lithography to fabricate a single mode optical waveguide with a built-in turning mirror capable of making 40° or 45° turns for vertical grating couplers or photodetectors, respectively. Planar alignment of the waveguide to fiber interfaces enable passive alignment, contributing to system cost reduction. An optical path with 1.1 dB loss from fiber to die was obtained from optical modeling, while the fabrication of single mode waveguides with built-in mirrors at <1° angular control was demonstrated.


2014 ◽  
Vol 625 ◽  
pp. 695-699
Author(s):  
Kozo Taguchi ◽  
Takuya Hayashi

In this paper, chemically etched axicon fiber was investigated for laser trapping of micro-object dispersed in liquid. We fabricated axicon micro lenses on a single-mode bare optical fiber by selective chemical etching technique. The laser beam from fiber axicon microlens was strongly focused and optical forces were sufficient to move a microorganisms and biological cells without physical contact. In our experiments, several different lasers with various wavelengths were used as light sources. From these experimental results, it was found that laser wavelength was very important parameter for cell trapping and laser wavelength should be selected to avoid absorption by cells in order to prevent thermal degradation and damage to the cells.


2016 ◽  
Vol 13 (2) ◽  
pp. 51-57 ◽  
Author(s):  
Bruce Chou ◽  
William Vis ◽  
Ryuta Furuya ◽  
Venky Sundaram ◽  
Rao Tummala

This article presents the modeling, design, fabrication, and characterization of ultra-low loss 3-D optical waveguides integrated on a glass photonic substrate. A novel, single-step process was developed using moving-mask lithography to fabricate a single-mode optical waveguide with a built-in turning mirror capable of achieving 40° or 45° turns for vertical grating couplers or photodetectors, respectively. Planar alignment of the waveguide to fiber interfaces enable passive alignment of the fibers, contributing to system cost reduction. An optical path with 0.81 dB loss from fiber to die was obtained from optical modeling, while the fabrication of single-mode waveguides with built-in total internal reflecting mirrors at <0.2 μm uniformity and <1° angular control was demonstrated.


2015 ◽  
Vol 48 (36) ◽  
pp. 365303 ◽  
Author(s):  
Jingchang Sun ◽  
Ting Zhao ◽  
Zhangwei Ma ◽  
Ming Li ◽  
Cheng Chang ◽  
...  

2012 ◽  
Vol 16 ◽  
pp. 15-20 ◽  
Author(s):  
Omid Tayefeh Ghalehbeygi ◽  
Vural Kara ◽  
Levent Trabzon ◽  
Selcuk Akturk ◽  
Huseyin Kizil

We fabricated Si Nano-columns by a femtosecond laser with various wavelengths and process parameters, whilst the specimen was submerged in water. The experiments were carried out by three types of wavelengths i.e. 1030 nm, 515nm, 343nm, with 500 fs laser pulses. The scales of these spikes are much smaller than micro spikes that are constructed by laser irradiation of silicon surface in vacuum or gases like SF6, Cl2. The Si nano-columns of 300 nm or less in width were characterized by SEM measurements. The formation of these Si Nano-columns that were revealed by SEM observation, indicates chemical etching with laser ablation occurred when surface exposed by laser beam. We observed 200 nm spikes height at the center of laser beam profile and the ones uniform in height at lateral incident area.


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