Structural study of β-SiC(001) films on Si(001) by laser chemical vapor deposition
2017 ◽
Vol 100
(4)
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pp. 1634-1641
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1999 ◽
Vol 347
(1-2)
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pp. 161-166
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Keyword(s):
2017 ◽
Vol 101
(4)
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pp. 1471-1478
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2013 ◽
Vol 365
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pp. 1-5
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Keyword(s):