Low-Temperature Deposition of Hexagonal Boron Nitride via Sequential Injection of Triethylboron and N2
/H2
Plasma
2014 ◽
Vol 97
(12)
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pp. 4052-4059
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1998 ◽
Vol 44
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pp. 627-633
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Keyword(s):
2011 ◽
Vol 26
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pp. 12-16
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1997 ◽
Vol 15
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pp. 1951-1954
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pp. 2126-2131
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