Manufacturing and Characterization of a Deformable Membrane with Integrated Temperature Sensors and Heating Structures in Low Temperature Co-fired Ceramics

2013 ◽  
Vol 10 (3) ◽  
pp. 435-442
Author(s):  
Nam Gutzeit ◽  
Jens Müller ◽  
Claudia Reinlein ◽  
Sylvia Gebhardt
Keyword(s):  
Low Temperature ◽  
Temperature Sensors ◽  
Deformable Membrane

Characterization of Low Temperature SiNx Films for 3D/2.5D-IC TSV

2015 ◽  
Vol 135 (7) ◽  
pp. 733-738 ◽  
Author(s):  
Yasushi Kobayashi ◽  
Yoshihiro Nakata ◽  
Tomoji Nakamura ◽  
Mayumi B. Takeyama ◽  
Masaru Sato ◽  
...  
Keyword(s):  
Low Temperature

Production and characterization of Sr2AlZrO5,5 ceramics to encapsulate temperature sensors in the petroleum extraction industry

2017 ◽  
Author(s):  
Andréa Sousa ◽  
Manuella Batista Padilha ◽  
Ricardo Artur Sanguinetti Ferreira ◽  
Yogendra Prasad Yadava ◽  
Renata Domingues ◽  
...  
Keyword(s):  
Temperature Sensors ◽  
Petroleum Extraction

Low temperature acoustic characterization of PMN single crystal

2017 ◽  
Vol 122 (8) ◽  
pp. 084103 ◽  
Author(s):  
E. Smirnova ◽  
A. Sotnikov ◽  
S. Ktitorov ◽  
H. Schmidt
Keyword(s):  
Low Temperature ◽  
Single Crystal ◽  
Acoustic Characterization
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