Performance and leakage optimization in carbon and fluorine co-implanted pMOSFETs

2008 International Symposium on VLSI Technology, Systems and Applications (VLSI-TSA) ◽

10.1109/vtsa.2008.4530784 ◽

2008 ◽

Author(s):

B.J. Pawlak ◽

R. Duffy ◽

J.C. Hooker ◽

T. Hoffman ◽

S. B. Felch ◽

...

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