5I-6 Finite Element Analysis of Fabrication Related Thermal Effects in Capacitive Micromachined Ultrasonic Transducers
2005 ◽
Vol 52
(12)
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pp. 2185-2198
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Keyword(s):
2017 ◽
Vol 85
◽
pp. 125-136
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Keyword(s):
Keyword(s):
2002 ◽
Vol 49
(3)
◽
pp. 293-298
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