Correlation between propagation loss and silicon dioxide film properties for surface acoustic wave devices

2013 ◽  
Vol 60 (5) ◽  
pp. 993-997 ◽  
Author(s):  
S. Matsuda ◽  
M. Miura ◽  
T. Matsuda ◽  
M. Ueda ◽  
Y. Satoh ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Silicon Dioxide ◽  
Surface Acoustic Wave ◽  
Propagation Loss ◽  
Film Properties ◽  
Silicon Dioxide Film ◽  
Acoustic Wave Devices ◽  
Dioxide Film

scholarly journals Surface acoustic wave devices for chemical sensing and microfluidics: a review and perspective

2017 ◽  
Vol 9 (28) ◽  
pp. 4112-4134 ◽  
Author(s):  
David B. Go ◽  
Massood Z. Atashbar ◽  
Zeinab Ramshani ◽  
Hsueh-Chia Chang
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Chemical Sensing ◽  
Chemical Detection ◽  
Microfluidic Platforms ◽  
Acoustic Wave Sensors ◽  
Acoustic Wave Devices ◽  
Wave Sensors

Surface acoustic wave sensors and microfluidic platforms enable effective chemical detection and sample manipulation.

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