Production issues in using Silicon Dioxide films for temperature compensated Bulk and Surface Acoustic Wave devices

2012 ◽  
Author(s):  
Sergey Mishin ◽  
Michael Gutkin
Keyword(s):  
Acoustic Wave ◽  
Silicon Dioxide ◽  
Surface Acoustic Wave ◽  
Silicon Dioxide Films ◽  
Acoustic Wave Devices

scholarly journals Surface acoustic wave devices for chemical sensing and microfluidics: a review and perspective

2017 ◽  
Vol 9 (28) ◽  
pp. 4112-4134 ◽  
Author(s):  
David B. Go ◽  
Massood Z. Atashbar ◽  
Zeinab Ramshani ◽  
Hsueh-Chia Chang
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Chemical Sensing ◽  
Chemical Detection ◽  
Microfluidic Platforms ◽  
Acoustic Wave Sensors ◽  
Acoustic Wave Devices ◽  
Wave Sensors

Surface acoustic wave sensors and microfluidic platforms enable effective chemical detection and sample manipulation.

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