Analysis of thickness-extensional waves propagating in the lateral direction of solidly mounted piezoelectric thin film resonators

2005 ◽  
Vol 52 (4) ◽  
pp. 604-609 ◽  
Author(s):  
K. Nakamura ◽  
S. Sato ◽  
S. Ohta ◽  
K. Yamada ◽  
A. Doi
Keyword(s):  
Thin Film ◽  
Lateral Direction ◽  
Piezoelectric Thin Film ◽  
Thin Film Resonators

Analysis of Piezoelectric Thin Film Resonators with Acoustic Quarter-Wave Multilayers

2000 ◽  
Vol 39 (Part 1, No. 5B) ◽  
pp. 3049-3053 ◽  
Author(s):  
Hirofumi Kanbara ◽  
Hideaki Kobayashi ◽  
Kiyoshi Nakamura
Keyword(s):  
Thin Film ◽  
Quarter Wave ◽  
Piezoelectric Thin Film ◽  
Thin Film Resonators

Study on the Lateral Piezoelectric Actuator with Actuation Range Amplifying Structure

2006 ◽  
Vol 326-328 ◽  
pp. 289-292 ◽  
Author(s):  
Taik Min Lee ◽  
Young Ho Seo ◽  
Kyung Hyun Whang ◽  
Doo Sun Choi
Keyword(s):  
Thin Film ◽  
Piezoelectric Actuator ◽  
Low Voltage ◽  
Lateral Displacement ◽  
Lateral Direction ◽  
Electrostatic Actuators ◽  
Pzt Actuator ◽  
Thermal Actuators ◽  
Piezoelectric Thin Film ◽  
Maximum Lateral Displacement

A novel piezoelectric micro-actuator with actuating range amplification structure has been proposed. This actuator is unique in that the leverage type amplification structure enables large actuating movement with low voltage. In case of general piezoelectric thin film actuator, applied voltage is low and almost zero power is consumed. Its switching time is very fast in comparison with electrostatic actuators and thermal actuators. However, the most drawback of piezoelectric actuator is short actuating range. A 100μm length PZT actuator can only make movement of 100. In this research, we suggest an actuator which can provide geometric amplification of the PZT strain displacement in lateral direction. The lateral piezoelectric MEMS actuator was fabricated and its actuating range was measured. The actuator shows maximum lateral displacement of 1.1μm, and break-down-voltage of the thin film PZT actuator is above 16V.

Fabrication of Piezoelectric Thin Film Resonators with Acoustic Quarter-Wave Multilayers

2002 ◽  
Vol 41 (Part 1, No. 5B) ◽  
pp. 3455-3457 ◽  
Author(s):  
Hideaki Kobayashi ◽  
Yasuaki Ishida ◽  
Kazuo Ishikawa ◽  
Arata Doi ◽  
Kiyoshi Nakamura
Keyword(s):  
Thin Film ◽  
Quarter Wave ◽  
Piezoelectric Thin Film ◽  
Thin Film Resonators
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