A laminated plate theory for high frequency, piezoelectric thin‐film resonators

1993 ◽  
Vol 74 (5) ◽  
pp. 3028-3046 ◽  
Author(s):  
Y.‐K. Yong ◽  
J. T. Stewart ◽  
A. Ballato
Keyword(s):  
Thin Film ◽  
High Frequency ◽  
Plate Theory ◽  
Laminated Plate ◽  
Piezoelectric Thin Film ◽  
Thin Film Resonators

Analysis of Piezoelectric Thin Film Resonators with Acoustic Quarter-Wave Multilayers

2000 ◽  
Vol 39 (Part 1, No. 5B) ◽  
pp. 3049-3053 ◽  
Author(s):  
Hirofumi Kanbara ◽  
Hideaki Kobayashi ◽  
Kiyoshi Nakamura
Keyword(s):  
Thin Film ◽  
Quarter Wave ◽  
Piezoelectric Thin Film ◽  
Thin Film Resonators

Analysis of Acoustic Wave Property on AlN/Diamond/Si Thin Film Substrates

2013 ◽  
Vol 312 ◽  
pp. 363-367 ◽  
Author(s):  
Shuming T. Wang ◽  
Shen Whan Chen ◽  
Bing Yi Chen ◽  
Chih Yuan Cheng ◽  
Rey Chue Hwang ◽  
...  
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
High Frequency ◽  
Temperature Characteristic ◽  
Research Data ◽  
Wave Property ◽  
Film Substrate ◽  
Piezoelectric Thin Film ◽  
Wave Properties ◽  
High Phase

Multi-layer piezoelectric thin-film substrates which may present properties of good temperature characteristic, high reflectivity, high coupling coefficient, high phase velocity, and integrated with semiconductor, have the potential to replace single crystal piezoelectric substrates used on acoustic devices. The properties of piezoelectric thin-film substrates are determined by the structures of the substrates, the piezoelectric material, the metal film thickness and etc. Usually the acoustic wave parameters of the substrates are not readily obtainable from literature. In this paper, the acoustic wave properties of thin film substrate of AlN/Diamond/Silicon were analyzed using finite element method. The research data of this paper would be applied to design high frequency RF acoustic devices such as resonators and filters.

Fabrication of Piezoelectric Thin Film Resonators with Acoustic Quarter-Wave Multilayers

2002 ◽  
Vol 41 (Part 1, No. 5B) ◽  
pp. 3455-3457 ◽  
Author(s):  
Hideaki Kobayashi ◽  
Yasuaki Ishida ◽  
Kazuo Ishikawa ◽  
Arata Doi ◽  
Kiyoshi Nakamura
Keyword(s):  
Thin Film ◽  
Quarter Wave ◽  
Piezoelectric Thin Film ◽  
Thin Film Resonators

scholarly journals Bacteria Detection with High-frequency Gravimetric Biosensors Based on AlN Thin Film Resonators

2016 ◽  
Vol 168 ◽  
pp. 638-641
Author(s):  
J.M. Escolano ◽  
J. Olivares ◽  
M. Clement ◽  
T. Mirea ◽  
J. Sangrador ◽  
...  
Keyword(s):  
Thin Film ◽  
High Frequency ◽  
Bacteria Detection ◽  
Thin Film Resonators
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