Fault Detection via Sparse Representation for Semiconductor Manufacturing Processes

Likun Ren; Weimin Lv

doi:10.1109/tsm.2014.2302011

Fault Detection via Sparse Representation for Semiconductor Manufacturing Processes

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2014.2302011 ◽

2014 ◽

Vol 27 (2) ◽

pp. 252-259 ◽

Cited By ~ 12

Author(s):

Likun Ren ◽

Weimin Lv

Keyword(s):

Fault Detection ◽

Sparse Representation ◽

Semiconductor Manufacturing ◽

Manufacturing Processes

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Fault Detection Using the k-Nearest Neighbor Rule for Semiconductor Manufacturing Processes

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2007.907607 ◽

2007 ◽

Vol 20 (4) ◽

pp. 345-354 ◽

Cited By ~ 200

Author(s):

Q. Peter He ◽

Jin Wang

Keyword(s):

Fault Detection ◽

Semiconductor Manufacturing ◽

Nearest Neighbor ◽

Manufacturing Processes ◽

K Nearest Neighbor ◽

Nearest Neighbor Rule

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Automated Fault Detection Using Convolutional Auto Encoder and k Nearest Neighbor Rule for Semiconductor Manufacturing Processes

2020 3rd International Conference on Intelligent Autonomous Systems (ICoIAS) ◽

10.1109/icoias49312.2020.9081852 ◽

2020 ◽

Author(s):

Haili Zhang ◽

Pu Wang ◽

Xuejin Gao ◽

Huihui Gao ◽

Yongsheng Qi

Keyword(s):

Fault Detection ◽

Semiconductor Manufacturing ◽

Nearest Neighbor ◽

Manufacturing Processes ◽

K Nearest Neighbor ◽

Nearest Neighbor Rule

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Fault Detection Using Human–Machine Co-Construct Intelligence in Semiconductor Manufacturing Processes

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2015.2432770 ◽

2015 ◽

Vol 28 (3) ◽

pp. 297-305 ◽

Cited By ~ 1

Author(s):

Manish Ranjit ◽

Harshvardhan Gazula ◽

Simon M. Hsiang ◽

Yang Yu ◽

Marcus Borhani ◽

...

Keyword(s):

Fault Detection ◽

Semiconductor Manufacturing ◽

Manufacturing Processes

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A Novel Fault Detection Method for Semiconductor Manufacturing Processes

2019 IEEE International Instrumentation and Measurement Technology Conference (I2MTC) ◽

10.1109/i2mtc.2019.8826957 ◽

2019 ◽

Cited By ~ 1

Author(s):

Zhen Sun ◽

Jingli Yang ◽

Kexin Zheng

Keyword(s):

Fault Detection ◽

Semiconductor Manufacturing ◽

Detection Method ◽

Manufacturing Processes

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A Novel Fault Detection Scheme Based on Difference in Independent Component for Reliable Process Monitoring: Application on the Semiconductor Manufacturing Processes

JOURNAL OF CHEMICAL ENGINEERING OF JAPAN ◽

10.1252/jcej.19we054 ◽

2020 ◽

Vol 53 (7) ◽

pp. 313-320

Author(s):

Cheng Zhang ◽

Tao Xu ◽

Yuan Li

Keyword(s):

Fault Detection ◽

Process Monitoring ◽

Semiconductor Manufacturing ◽

Independent Component ◽

Manufacturing Processes ◽

Detection Scheme ◽

Monitoring Application

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Trace Abstraction: A Novel Method to Enhance Fault Detection in Semiconductor Manufacturing Processes with An Optimization Approach

10.1109/phm-nanjing52125.2021.9613041 ◽

2021 ◽

Author(s):

Jianshe Feng ◽

Feng Zhu ◽

Zongchang Liu ◽

Jianyu Zhang ◽

Lin Hua ◽

...

Keyword(s):

Fault Detection ◽

Semiconductor Manufacturing ◽

Manufacturing Processes ◽

Optimization Approach ◽

Novel Method

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Fault Detection Using Random Projections and k-Nearest Neighbor Rule for Semiconductor Manufacturing Processes

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2014.2374339 ◽

2015 ◽

Vol 28 (1) ◽

pp. 70-79 ◽

Cited By ~ 39

Author(s):

Zhe Zhou ◽

Chenglin Wen ◽

Chunjie Yang

Keyword(s):

Fault Detection ◽

Semiconductor Manufacturing ◽

Nearest Neighbor ◽

Random Projections ◽

Manufacturing Processes ◽

K Nearest Neighbor ◽

Nearest Neighbor Rule

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Fault Detection Using Principal Components-Based Gaussian Mixture Model for Semiconductor Manufacturing Processes

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2011.2154850 ◽

2011 ◽

Vol 24 (3) ◽

pp. 432-444 ◽

Cited By ~ 57

Author(s):

Jianbo Yu

Keyword(s):

Fault Detection ◽

Gaussian Mixture Model ◽

Mixture Model ◽

Principal Components ◽

Semiconductor Manufacturing ◽

Gaussian Mixture ◽

Manufacturing Processes

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Fault Detection Strategy Based on Weighted Distance of $k$ Nearest Neighbors for Semiconductor Manufacturing Processes

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2018.2857818 ◽

2019 ◽

Vol 32 (1) ◽

pp. 75-81 ◽

Cited By ~ 5

Author(s):

Cheng Zhang ◽

Xianwen Gao ◽

Yuan Li ◽

Liwei Feng

Keyword(s):

Fault Detection ◽

Semiconductor Manufacturing ◽

Nearest Neighbors ◽

Manufacturing Processes ◽

Weighted Distance ◽

Detection Strategy

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Nearest neighbor difference rule-based kernel principal component analysis for fault detection in semiconductor manufacturing processes

Journal of Chemometrics ◽

10.1002/cem.2888 ◽

2017 ◽

Vol 31 (6) ◽

pp. e2888 ◽

Cited By ~ 10

Author(s):

Cheng Zhang ◽

Xianwen Gao ◽

Tao Xu ◽

Yuan Li

Keyword(s):

Principal Component Analysis ◽

Fault Detection ◽

Semiconductor Manufacturing ◽

Nearest Neighbor ◽

Principal Component ◽

Component Analysis ◽

Kernel Principal Component Analysis ◽

Manufacturing Processes ◽

Rule Based

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