Nearest neighbor difference rule-based kernel principal component analysis for fault detection in semiconductor manufacturing processes

2017 ◽  
Vol 31 (6) ◽  
pp. e2888 ◽  
Author(s):  
Cheng Zhang ◽  
Xianwen Gao ◽  
Tao Xu ◽  
Yuan Li
Keyword(s):  
Principal Component Analysis ◽  
Fault Detection ◽  
Semiconductor Manufacturing ◽  
Nearest Neighbor ◽  
Principal Component ◽  
Component Analysis ◽  
Kernel Principal Component Analysis ◽  
Manufacturing Processes ◽  
Rule Based

scholarly journals Monitoring a Reverse Osmosis Process with Kernel Principal Component Analysis: A Preliminary Approach

2021 ◽  
Vol 11 (14) ◽  
pp. 6370
Author(s):  
Elena Quatrini ◽  
Francesco Costantino ◽  
David Mba ◽  
Xiaochuan Li ◽  
Tat-Hean Gan
Keyword(s):  
Principal Component Analysis ◽  
Fault Detection ◽  
Water Purification ◽  
Principal Component ◽  
Temporal Correlation ◽  
Component Analysis ◽  
Kernel Principal Component Analysis ◽  
Original Dataset ◽  
Monitoring Process ◽  
Machine Health

The water purification process is becoming increasingly important to ensure the continuity and quality of subsequent production processes, and it is particularly relevant in pharmaceutical contexts. However, in this context, the difficulties arising during the monitoring process are manifold. On the one hand, the monitoring process reveals various discontinuities due to different characteristics of the input water. On the other hand, the monitoring process is discontinuous and random itself, thus not guaranteeing continuity of the parameters and hindering a straightforward analysis. Consequently, further research on water purification processes is paramount to identify the most suitable techniques able to guarantee good performance. Against this background, this paper proposes an application of kernel principal component analysis for fault detection in a process with the above-mentioned characteristics. Based on the temporal variability of the process, the paper suggests the use of past and future matrices as input for fault detection as an alternative to the original dataset. In this manner, the temporal correlation between process parameters and machine health is accounted for. The proposed approach confirms the possibility of obtaining very good monitoring results in the analyzed context.

scholarly journals Fault detection and estimation using kernel principal component analysis

2017 ◽  
Vol 50 (1) ◽  
pp. 1025-1030 ◽  
Author(s):  
Maya Kallas ◽  
Gilles Mourot ◽  
Kwami Anani ◽  
José Ragot ◽  
Didier Maquin
Keyword(s):  
Principal Component Analysis ◽  
Fault Detection ◽  
Principal Component ◽  
Component Analysis ◽  
Kernel Principal Component Analysis ◽  
Detection And Estimation
Sign in / Sign up

Export Citation Format

Share Document