Power-Efficient High-Speed and High-Resolution Capacitive-Sensor Interface for Subnanometer Displacement Measurements
2012 ◽
Vol 61
(5)
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pp. 1315-1322
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Keyword(s):
Keyword(s):
2005 ◽
Vol 54
(5)
◽
pp. 1934-1940
◽
Keyword(s):
Keyword(s):
Keyword(s):
2006 ◽
Vol 53
(11)
◽
pp. 1165-1169
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