Robust and Precision Motion Control System of Linear-Motor Direct Drive for High-Speed<tex>$X$</tex>–<tex>$Y$</tex>Table Positioning Mechanism
2005 ◽
Vol 52
(5)
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pp. 1357-1363
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2007 ◽
Vol 12
(3)
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pp. 317-329
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2006 ◽
Vol 14
(6)
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pp. 1008-1020
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2002 ◽
Vol 10
(7)
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pp. 757-772
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2010 ◽
Vol 7
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pp. 109-117
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