Frequency Stability of RF-MEMS Disk Resonators

2015 ◽  
Vol 62 (5) ◽  
pp. 1603-1608 ◽  
Author(s):  
Quan Yuan ◽  
Wei Luo ◽  
Hui Zhao ◽  
Bohua Peng ◽  
Jinling Yang ◽  
...  
2018 ◽  
Vol 23 (No 3, September 2018) ◽  
pp. 321-326
Author(s):  
Masoud Baghelani

Miniaturization is the most sophisticated method for achieving UHF and SHF resonance frequencies in RF MEMS resonators. However, by reducing the dimensions of the resonators, the size of their supports become more comparable with the size of the resonator and anchor loss becomes the dominant loss mechanism, thereby suppressing the quality factor. This study considers, Ring Shape Anchored Contour Mode Disk Resonator and calculates anchor loss effects using both energy loss and acoustic impedance ratio methods. Results of analytical calculations are verified using finite element harmonic analysis. Simulation results show that RSACMDRs have an acceptable quality factor in comparison with the other state-of-the-art resonators.


2010 ◽  
Vol 130 (6) ◽  
pp. 247-252
Author(s):  
Michihiko Nishigaki ◽  
Toshihiko Nagano ◽  
Hiroshi Ono ◽  
Takashi Kawakubo ◽  
Kazuhiko Itaya
Keyword(s):  
Rf Mems ◽  

PIERS Online ◽  
2008 ◽  
Vol 4 (4) ◽  
pp. 433-436 ◽  
Author(s):  
Yaping Liang ◽  
Calvin W. Domier ◽  
Neville C. Luhmann, Jr.

2020 ◽  
Vol 12 ◽  
Author(s):  
Pampa Debnath ◽  
Ujjwal Mondal ◽  
Arpan Deyasi

Aim:: Computation of loss factors for one-bit RF MEMS switch over Ku, K and Ka-band for two different insulating substrates. Objective:: Numerical investigation of return loss, insertion loss, isolation loss are computed under both actuated and unactuated states for two different insulating substrates of the 1-bit RF MEMS switch, and corresponding up and down-capacitances are obtained. Methods:: The unique characteristics of a 1-bit RF MEMS switch of providing higher return loss under both actuated and unactuated states and also of isolation loss with negligible insertion loss makes it as a prime candidate for phase shifter application. This is presented in this manuscript with a keen focus on improvement capability by changing transmission line width, and also of overlap area; where dielectric constant of the substrate also plays a vital role. Results:: The present work exhibits very low down-capacitance over the spectrum whereas considerable amount of up-capacitance. Also when overall performance in terms of all loss parameters are considered, switch provides very low insertion loss, good return loss under actuated state and standard isolation loss. Conclusion:: Reduction of transmission line width of about 33% improved the performance of the switch by increasing isolation loss. Isolation loss of -40 dB is obtained at actuated condition in higher microwave spectra for SiO 2 at higher overlap area. Down capacitance of ~ 1dB is obtained which is novel as compared with other published literature. Moreover, a better combination of both return loss, isolation loss and insertion loss are reported in this present work compared with all other published data so far.


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