Micromechanical Disk Array for Enhanced Frequency Stability Against Bias Voltage Fluctuations
1992 ◽
Vol 50
(2)
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pp. 1144-1145
2012 ◽
Vol E95.C
(6)
◽
pp. 1077-1085
◽
High Temperature Material Processes An International Quarterly of High-Technology Plasma Processes
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1997 ◽
Vol 1
(2)
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pp. 179-190
◽