Fitting Cells Into a Narrow $V_{T}$ Interval: Physical Constraints Along the Lifetime of an Extremely Scaled NAND Flash Memory Array

2015 ◽  
Vol 62 (5) ◽  
pp. 1491-1497 ◽  
Author(s):  
Giovanni Maria Paolucci ◽  
Christian Monzio Compagnoni ◽  
Alessandro S. Spinelli ◽  
Andrea L. Lacaita ◽  
Akira Goda
2012 ◽  
Vol E95.C (5) ◽  
pp. 837-841 ◽  
Author(s):  
Se Hwan PARK ◽  
Yoon KIM ◽  
Wandong KIM ◽  
Joo Yun SEO ◽  
Hyungjin KIM ◽  
...  

2010 ◽  
Vol 31 (12) ◽  
pp. 1374-1376 ◽  
Author(s):  
Wandong Kim ◽  
Jung Hoon Lee ◽  
Jang-Gn Yun ◽  
Seongjae Cho ◽  
Dong-Hua Li ◽  
...  

2011 ◽  
Vol 58 (10) ◽  
pp. 3626-3629 ◽  
Author(s):  
Myounggon Kang ◽  
Wookghee Hahn ◽  
Il Han Park ◽  
Juyoung Park ◽  
Youngsun Song ◽  
...  

Author(s):  
Chung-Huan Chang ◽  
Pei-Ning Hsu ◽  
Yu-Min Chung ◽  
Nan-Tzu Lian ◽  
Ta-Hone Yang ◽  
...  

Abstract In this work, two analysis methods for word line (WL) defect localization in NAND flash memory array are presented. One is to use the Emission Microscope (EMMI) and Optical Beam Induced Resistance Change (OBIRCH) to analyze the device through backside, which has no risk of damage during sample preparation. Depending on the I-V characteristics of defects, different analysis tools can be applied. The second method is to analyze a device defect location that is hard to detect through backside analysis. The precise defect site can be localized by Electron Beam Induce Resistance Change (EBIRCH) [1,2], and the defect profile can be observed. The large memory array in NAND flash structure leads to the wide sample movement during EBIRCH analysis. The sub-stage movement function used successfully solves this problem.


2009 ◽  
Vol 24 (10) ◽  
pp. 105029 ◽  
Author(s):  
Shouyu Wang ◽  
Mitue Takahashi ◽  
Qiu-Hong Li ◽  
Ken Takeuchi ◽  
Shigeki Sakai

Sign in / Sign up

Export Citation Format

Share Document