Top-Down Fabrication of Epitaxial SiGe/Si Multi-(Core/Shell) p-FET Nanowire Transistors

2014 ◽  
Vol 61 (4) ◽  
pp. 953-956 ◽  
Author(s):  
Sylvain Barraud ◽  
Jean-Michel Hartmann ◽  
Virginie Maffini-Alvaro ◽  
Lucie Tosti ◽  
Vincent Delaye ◽  
...  
2010 ◽  
Vol 20 (24) ◽  
pp. 4273-4278 ◽  
Author(s):  
Youn-Kyoung Baek ◽  
Seung Min Yoo ◽  
Taejoon Kang ◽  
Hwan-Jin Jeon ◽  
Kyounghwan Kim ◽  
...  

2020 ◽  
Vol 8 (3) ◽  
pp. 1487-1487
Author(s):  
Min Soo Kim ◽  
Muhammad Awais Abbas ◽  
Raju Thota ◽  
Jin Ho Bang

Correction for ‘Thermally induced top-down nanostructuring for the synthesis of a core/shell-structured CoO/CoSx electrocatalyst’ by Min Soo Kim et al., J. Mater. Chem. A, 2019, 7, 26557–26565.


ACS Nano ◽  
2020 ◽  
Vol 14 (10) ◽  
pp. 12749-12760
Author(s):  
You Meng ◽  
Zhengxun Lai ◽  
Fangzhou Li ◽  
Wei Wang ◽  
SenPo Yip ◽  
...  

2017 ◽  
Vol 255 (5) ◽  
pp. 1700445 ◽  
Author(s):  
Pierre-Marie Coulon ◽  
Gunnar Kusch ◽  
Emmanuel D. Le Boulbar ◽  
Pierre Chausse ◽  
Christopher Bryce ◽  
...  
Keyword(s):  
Top Down ◽  
Deep Uv ◽  

2021 ◽  
Author(s):  
Naoki Fukata ◽  
Wipakorn Jevasuwan ◽  
Yonglie Sun ◽  
Yoshimasa Sugimoto

Abstract Control of surface defects and impurity doping are important keys to realizing devices that use semiconductor nanowires (NWs). As a structure capable of suppressing impurity scattering, p-Si/i (intrinsic)-Ge core-shell NWs with radial heterojunctions inside the NWs were formed. When forming NWs using a top-down method, the positions of the NWs can be controlled, but their surface is damaged. When heat treatment for repairing surface damage is performed, the surface roughness of the NWs closely depends on the kind of atmospheric gas. Oxidation and chemical etching prior to shell formation removes the surface damaged layer on p-SiNWs and simultaneously achieves a reduction in the diameter of the NWs. Finally, hole gas accumulation, which is important for suppressing impurity scattering, can be observed in the i-Ge layers of p-Si/i-Ge core-shell NWs.


2011 ◽  
Author(s):  
J. E. Jin ◽  
J. H. Lee ◽  
D. H. Hwang ◽  
D. W. Kim ◽  
M. J. Kim ◽  
...  

2014 ◽  
Vol 9 (1) ◽  
Author(s):  
Suhana M Sultan ◽  
Nonofo J Ditshego ◽  
Robert Gunn ◽  
Peter Ashburn ◽  
Harold MH Chong

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