Reduction of Charge Trapping in $\hbox{HfO}_{2}$ Film on Ge Substrates by Atomic Layer Deposition of Various Passivating Interfacial Layers

2012 ◽  
Vol 59 (9) ◽  
pp. 2350-2356 ◽  
Author(s):  
Hyung-Suk Jung ◽  
Il-Hyuk Yu ◽  
Hyo Kyeom Kim ◽  
Sang Young Lee ◽  
Joohwi Lee ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Charge Trapping ◽  
Atomic Layer ◽  
Interfacial Layers ◽  
Layer Deposition

scholarly journals Negative charge trapping effects in Al2O3 films grown by atomic layer deposition onto thermally oxidized 4H-SiC

AIP Advances ◽  
2016 ◽  
Vol 6 (7) ◽  
pp. 075021 ◽  
Author(s):  
Emanuela Schilirò ◽  
Raffaella Lo Nigro ◽  
Patrick Fiorenza ◽  
Fabrizio Roccaforte
Keyword(s):  
Atomic Layer Deposition ◽  
Negative Charge ◽  
Charge Trapping ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Al2o3 Films ◽  
Trapping Effects

scholarly journals Effect of concurrent joule heat and charge trapping on RESET for NbAlO fabricated by atomic layer deposition

2013 ◽  
Vol 8 (1) ◽  
Author(s):  
Peng Zhou ◽  
Li Ye ◽  
Qing Qing Sun ◽  
Peng Fei Wang ◽  
An Quan Jiang ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Charge Trapping ◽  
Atomic Layer ◽  
Joule Heat ◽  
Layer Deposition

Charge-Trapping Characteristics of Al2O3/Cu/Al2O3 Nanolaminate Structures Prepared Through Atomic Layer Deposition

2011 ◽  
Vol 11 (7) ◽  
pp. 5887-5891
Author(s):  
Byung Kook Lee ◽  
Seok Hwan Kim ◽  
Bo Keun Park ◽  
Sun Sook Lee ◽  
Jin-Ha Hwang ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Charge Trapping ◽  
Atomic Layer ◽  
Layer Deposition

Influence of atomic layer deposition chemistry on high-k dielectrics for charge trapping memories

2012 ◽  
Vol 68 ◽  
pp. 38-47 ◽  
Author(s):  
Nikolaos Nikolaou ◽  
Panagiotis Dimitrakis ◽  
Pascal Normand ◽  
Vassilios Ioannou-Sougleridis ◽  
Konstantinos Giannakopoulos ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Charge Trapping ◽  
Atomic Layer ◽  
Layer Deposition ◽  
High K

Influence of HfO2 and SiO2 interfacial layers on the characteristics of n-GaN/HfSiOx capacitors using plasma-enhanced atomic layer deposition

2021 ◽  
Vol 39 (6) ◽  
pp. 062405
Author(s):  
Toshihide Nabatame ◽  
Erika Maeda ◽  
Mari Inoue ◽  
Masafumi Hirose ◽  
Yoshihiro Irokawa ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Interfacial Layers ◽  
Layer Deposition
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