Defect Passivation With Fluorine and Interface Engineering for Hf-Based High- $k$/Metal Gate Stack Device Reliability and Performance Enhancement

2007 ◽  
Vol 54 (12) ◽  
pp. 3267-3275 ◽  
Author(s):  
Hsing-Huang Tseng ◽  
Philip J. Tobin ◽  
Sriram Kalpat ◽  
Jamie K. Schaeffer ◽  
Michael E. Ramon ◽  
...  
Keyword(s):  
Performance Enhancement ◽  
Interface Engineering ◽  
Metal Gate ◽  
Gate Stack ◽  
Device Reliability ◽  
Defect Passivation ◽  
And Performance

Fluorine interface treatments within the gate stack for defect passivation in 28 nm high-k metal gate technology

2015 ◽  
Vol 33 (2) ◽  
pp. 022204 ◽  
Author(s):  
Maximilian Drescher ◽  
Andreas Naumann ◽  
Jonas Sundqvist ◽  
Elke Erben ◽  
Carsten Grass ◽  
...  
Keyword(s):  
Metal Gate ◽  
Gate Stack ◽  
High K ◽  
Defect Passivation ◽  
28 Nm

scholarly journals Mechanical and Microstructural Characteristics of Calcium Sulfoaluminate Cement Exposed to Early-Age Carbonation Curing

Materials ◽  
2021 ◽  
Vol 14 (13) ◽  
pp. 3515
Author(s):  
Weikang Wang ◽  
Xuanchun Wei ◽  
Xinhua Cai ◽  
Hongyang Deng ◽  
Bokang Li
Keyword(s):  
Cement Paste ◽  
Pore Diameter ◽  
Performance Enhancement ◽  
Diameter Distribution ◽  
Early Age ◽  
Calcium Sulfoaluminate ◽  
Starting Point ◽  
And Performance ◽  
Curing Pressure ◽  
Carbonation Curing

: The early-age carbonation curing technique is an effective way to improve the performance of cement-based materials and reduce their carbon footprint. This work investigates the early mechanical properties and microstructure of calcium sulfoaluminate (CSA) cement specimens under early-age carbonation curing, considering five factors: briquetting pressure, water–binder (w/b) ratio, starting point of carbonation curing, carbonation curing time, and carbonation curing pressure. The carbonization process and performance enhancement mechanism of CSA cement are analyzed by mercury intrusion porosimetry (MIP), thermogravimetry and derivative thermogravimetry (TG-DTG) analysis, X-ray diffraction (XRD), and scanning electron microscope (SEM). The results show that early-age carbonation curing can accelerate the hardening speed of CSA cement paste, reduce the cumulative porosity of the cement paste, refine the pore diameter distribution, and make the pore diameter distribution more uniform, thus greatly improving the early compressive strength of the paste. The most favorable w/b ratio for the carbonization reaction of CSA cement paste is between 0.15 and 0.2; the most suitable carbonation curing starting time point is 4 h after initial hydration; the carbonation curing pressure should be between 3 and 4 bar; and the most appropriate time for carbonation curing is between 6 and 12 h.

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