A simple technique to determine barrier height change in gate oxide caused by electrical stress

2002 ◽  
Vol 49 (8) ◽  
pp. 1493-1496 ◽  
Author(s):  
T.P. Chen
2002 ◽  
Vol 41 (Part 2, No. 12B) ◽  
pp. L1425-L1427
Author(s):  
Shyue Seng Tan ◽  
Tu Pei Chen ◽  
Chew Hoe Ang

1999 ◽  
Vol 567 ◽  
Author(s):  
Michel Houssa ◽  
P.W. Mertens ◽  
M.M. Heyns

ABSTRACTThe time-dependent dielectric breakdown of MOS capacitors with ultra-thin gate oxide layers is investigated. After the occurrence of soft breakdown, the gate current increases by 3 to 4 orders of magnitudes and behaves like a power law of the applied gate voltage. It is shown that this behavior can be explained by assuming that a percolation path is formed between the electron traps generated in the gate oxide layer during electrical stress of the capacitors. The time dependence of the gate voltage signal after soft breakdown is next analysed. It is shown that the fluctuations in the gate voltage are non-gaussian as well as that long-range correlations exist in the system after soft breakdown. These results can be explained by a dynamic percolation model, taking into account the trapping-detrapping of charges within the percolation cluster formed at soft breakdown.


2007 ◽  
Vol 84 (9-10) ◽  
pp. 2081-2084 ◽  
Author(s):  
J.M. Rafí ◽  
E. Simoen ◽  
A. Mercha ◽  
K. Hayama ◽  
F. Campabadal ◽  
...  

Author(s):  
Li Liu ◽  
Yin-Tang Yang

AbstractCurrent conduction mechanisms of SiC metal-oxide-semiconductor (MOS) capacitors on n-type 4H-SiC with or without NO annealing have been investigated in this work. It has been revealed that Fowler-Nordheim (FN) tunneling is the dominating current conduction mechanism in high electrical fields, with barrier height of 2.67 and 2.54 eV respectively for samples with NO and without NO annealing. A higher barrier height for NO-annealed sample indicates the effect of N element on the SiC/SiO


1992 ◽  
Vol 13 (5) ◽  
pp. 244-246 ◽  
Author(s):  
R.B. Sethi ◽  
U.S. Kim ◽  
I. Johnson ◽  
P. Cacharelis ◽  
M. Manley
Keyword(s):  

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