Scalability potential in ELTRAN/sup (R)/ SOI-epi wafer

2000 IEEE International SOI Conference. Proceedings (Cat. No.00CH37125) ◽

10.1109/soi.2000.892744 ◽

2002 ◽

Cited By ~ 4

Author(s):

M. Ito ◽

K. Yamagata ◽

H. Miyabayashi ◽

T. Yonehara

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