Effects of nitrogen on the activation/deactivation of boron and indium in n-channel CMOS devices

2000 International Conference on Simulation Semiconductor Processes and Devices (Cat. No.00TH8502) ◽

10.1109/sispad.2000.871232 ◽

2002 ◽

Author(s):

S. Aronowitz ◽

H. Puchner ◽

V. Zubcov

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