A high d33 CMOS compatible process for aluminum nitride on titanium

2009 ◽  
Author(s):  
J.C. Doll ◽  
B.C. Petzold ◽  
B. Ninan ◽  
R. Mullapudi ◽  
B.L. Pruitt
Keyword(s):  
Aluminum Nitride ◽  
Cmos Compatible

CMOS-compatible light-emitting devices based on thin aluminum nitride film containing Al nanocrystals

2009 ◽  
Vol 95 (3) ◽  
pp. 753-756 ◽  
Author(s):  
Y. Liu ◽  
T. P. Chen ◽  
M. Yang ◽  
Z. H. Cen ◽  
X. B. Chen ◽  
...  
Keyword(s):  
Aluminum Nitride ◽  
Nitride Film ◽  
Light Emitting ◽  
Light Emitting Devices ◽  
Thin Aluminum ◽  
Cmos Compatible

Post-CMOS-Compatible Aluminum Nitride Resonant MEMS Accelerometers

2009 ◽  
Vol 18 (3) ◽  
pp. 671-678 ◽  
Author(s):  
Roy H. Olsson ◽  
Kenneth E. Wojciechowski ◽  
Michael S. Baker ◽  
Melanie R. Tuck ◽  
James G. Fleming
Keyword(s):  
Aluminum Nitride ◽  
Mems Accelerometers ◽  
Cmos Compatible

scholarly journals Aluminum nitride on titanium for CMOS compatible piezoelectric transducers

2009 ◽  
Vol 20 (2) ◽  
pp. 025008 ◽  
Author(s):  
Joseph C Doll ◽  
Bryan C Petzold ◽  
Biju Ninan ◽  
Ravi Mullapudi ◽  
Beth L Pruitt
Keyword(s):  
Aluminum Nitride ◽  
Piezoelectric Transducers ◽  
Cmos Compatible

scholarly journals A functional CMOS compatible MEMS pyroelectric detector using 12%-doped scandium aluminum nitride

2020 ◽  
Vol 117 (18) ◽  
pp. 183506
Author(s):  
D. K. T. Ng ◽  
T. Zhang ◽  
L. Y. Siow ◽  
L. Xu ◽  
C. P. Ho ◽  
...  
Keyword(s):  
Aluminum Nitride ◽  
Pyroelectric Detector ◽  
Cmos Compatible
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