MEMS accelerometer with mechanical amplification mechanism for enhanced sensitivity

2009 ◽  
Author(s):  
A. Yaakobovitz ◽  
S. Krylov
Keyword(s):  
Mems Accelerometer ◽  
Enhanced Sensitivity ◽  
Mechanical Amplification ◽  
Amplification Mechanism

Mechanical amplification mechanism of kinesin’s β-domain

2014 ◽  
Vol 543 ◽  
pp. 10-14 ◽  
Author(s):  
Yi-Zhao Geng ◽  
Shu-Xia Liu ◽  
Qing Ji ◽  
Shiwei Yan
Keyword(s):  
Mechanical Amplification ◽  
Amplification Mechanism

scholarly journals Feasibility study of using amplified piezo-stack actuators for the actuation of direct drive servovalves

2020 ◽  
Vol 197 ◽  
pp. 07004
Author(s):  
Paolo Tamburrano ◽  
Pietro De Palma ◽  
Andrew R. Plummer ◽  
Elia Distaso ◽  
Riccardo Amirante
Keyword(s):  
Shear Force ◽  
Response Speed ◽  
Fast Response ◽  
Step Response ◽  
Direct Drive ◽  
Advantages And Disadvantages ◽  
Performance Predictions ◽  
Mechanical Amplification ◽  
Linear Force ◽  
Amplification Mechanism

In this paper, we investigate the idea of using, in place of recent linear force motors, amplified piezo-stack actuators for the actuation of direct drive servovalves, in order to exploit the fast response of piezoelements accompanied by the increased displacement ensured by mechanical amplification systems. Some possible architectures are proposed in this paper for the direct actuation of four-way three-position (4/3) servovalves using one or two commercially available amplified piezo-stack actuators having a diamond amplification mechanism. The simplest architecture, which employs only one actuator, is assessed using wellestablished equations implemented in Simulink, allowing the hydraulic, mechanical and electrical parts of the valve to be accurately simulated. Three spools of different size are considered in the simulations in order to obtain performance predictions for different valve flow ratings. From the analysis of the inherent characteristics of the amplified piezo-stack and from the results of the simulations, advantages and disadvantages of this possible architecture are drawn and discussed in detail. Among the advantages, there are the simplicity of construction and the high potential in terms of step response speed and frequency response; the large dimensions, low chip shear force capability and high costs are the main disadvantages.

A microelectromechanical system (MEMS) capacitive accelerometer-based microphone with enhanced sensitivity for fully implantable hearing aid: a novel analytical approach

2020 ◽  
Vol 65 (6) ◽  
pp. 735-746
Author(s):  
Apoorva Dwivedi ◽  
Gargi Khanna
Keyword(s):  
Analytical Approach ◽  
Bone Structure ◽  
Design Parameters ◽  
Comsol Multiphysics ◽  
Implantable Hearing Aid ◽  
Microelectromechanical System ◽  
Capacitive Accelerometer ◽  
Enhanced Sensitivity ◽  
Mechanical Amplification ◽  
The Impact

AbstractThe present work proposes a novel, compact, intuitively simple and efficient structure to improve the sensitivity of a microelectromechanical system (MEMS) capacitive accelerometer using an arrangement of microlever as a displacement amplifier. The accelerometer is proposed to serve as a microphone in the fully implantable cochlear prosthetic system which can be surgically implanted at the middle ear bone structure. Therefore, the design parameters such as size, weight and resonant frequency require deliberation. The paper presents a novel analytical model considering the impact of the mechanical amplification along with the width of the microlever and the capacitive fringe effects on the performance of the sensor. The design is simulated and verified using COMSOL MULTIPHYSICS 4.2. The accelerometer is designed within a sensing area of 1 mm2 and accomplishes a nominal capacitance of 4.85 pF and an excellent sensitivity of 5.91 fF/g.

Eyes and ears: Rejection and enhanced sensitivity to auditory and visual social cues

2003 ◽  
Author(s):  
Cynthia L. Pickett ◽  
Wendi L. Gardner ◽  
Megan Knowles
Keyword(s):  
Social Cues ◽  
Enhanced Sensitivity
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