Electrical critical dimension measurement method by integration of test structure into MEMS devices

2005 ◽  
Author(s):  
K. Ito ◽  
Y. Mita ◽  
M. Kubota ◽  
F. Marty ◽  
T. Bourouina ◽  
...  
Keyword(s):  
Measurement Method ◽  
Critical Dimension ◽  
Test Structure ◽  
Mems Devices ◽  
Dimension Measurement

scholarly journals Critical dimension measurement of transparent film layers by multispectral imaging

2014 ◽  
Vol 22 (14) ◽  
pp. 17370 ◽  
Author(s):  
Soonyang Kwon ◽  
Namyoon Kim ◽  
Taeyong Jo ◽  
Heui Jae Pahk
Keyword(s):  
Multispectral Imaging ◽  
Critical Dimension ◽  
Transparent Film ◽  
Dimension Measurement

Critical-Dimension Measurement using Multi-Angle-Scanning Method in Atomic Force Microscope

2006 ◽  
Vol 45 (7) ◽  
pp. 5928-5932 ◽  
Author(s):  
Ken Murayama ◽  
Satoshi Gonda ◽  
Hajime Koyanagi ◽  
Tsuneo Terasawa ◽  
Sumio Hosaka
Keyword(s):  
Atomic Force Microscope ◽  
Critical Dimension ◽  
Scanning Method ◽  
Atomic Force ◽  
Dimension Measurement
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