Frequency stability of wafer-scale encapsulated MEMS resonators

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. ◽

10.1109/sensor.2005.1497485 ◽

2005 ◽

Cited By ~ 50

Author(s):

Bongsang Kim ◽

R.N. Candler ◽

M. Hopcroft ◽

M. Agarwal ◽

Woo-Tac Park ◽

...

Keyword(s):

Frequency Stability ◽

Wafer Scale ◽

Mems Resonators

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Frequency stability of wafer-scale film encapsulated silicon based MEMS resonators

Sensors and Actuators A Physical ◽

10.1016/j.sna.2006.10.040 ◽

2007 ◽

Vol 136 (1) ◽

pp. 125-131 ◽

Cited By ~ 76

Author(s):

Bongsang Kim ◽

Rob N. Candler ◽

Matthew A. Hopcroft ◽

Manu Agarwal ◽

Woo-Tae Park ◽

...

Keyword(s):

Frequency Stability ◽

Wafer Scale ◽

Mems Resonators ◽

Silicon Based

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Analysis of Frequency Stability and Thermoelastic Effects for Slotted Tuning Fork MEMS Resonators

Sensors ◽

10.3390/s18072157 ◽

2018 ◽

Vol 18 (7) ◽

pp. 2157 ◽

Cited By ~ 6

Author(s):

Valentina Zega ◽

Attilio Frangi ◽

Andrea Guercilena ◽

Gabriele Gattere

Keyword(s):

Tuning Fork ◽

Frequency Stability ◽

Mems Resonators ◽

Thermoelastic Effects

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Vertical MEMS Resonators for Real-Time Clock Applications

Journal of Sensors ◽

10.1155/2010/362439 ◽

2010 ◽

Vol 2010 ◽

pp. 1-5 ◽

Cited By ~ 1

Author(s):

A. Pomarico ◽

A. Morea ◽

P. Flora ◽

G. Roselli ◽

E. Lasalandra

Keyword(s):

Real Time ◽

High Performance ◽

Large Scale ◽

Low Cost ◽

Frequency Stability ◽

Equivalent Resistance ◽

Real Time Clock ◽

Mems Resonator ◽

Mems Resonators ◽

Frequency Tunable

MEMS resonators are today widely investigated as a desirable alternative to quartz resonators in real-time clock applications, because of their low-cost, integration capability properties. Nevertheless, MEMS resonators performances are still not competitive, especially in terms of frequency stability and device equivalent resistance (and, then, power consumption). We propose a new structure for a MEMS resonator, with a vertical-like transduction mechanism, which exhibits promising features. The vertical resonator can be fabricated with the low-cost, high performance THELMA technology, and it is designed to be efficiently frequency tunable. With respect to the commonly investigated lateral resonators, it is expected to have lower equivalent resistances and improved large-scale repeatability characteristics.

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