A high density capacitive pressure sensor array for fingerprint sensor application

2002 ◽  
Author(s):  
P. Rey ◽  
P. Charvet ◽  
M.T. Delaye ◽  
S. Abou Hassan
Keyword(s):  
Pressure Sensor ◽  
Sensor Array ◽  
High Density ◽  
Capacitive Pressure Sensor ◽  
Sensor Application ◽  
Fingerprint Sensor

Development of circuit solution and design of capacitive pressure sensor array for applied robotics

2020 ◽  
Vol 8 (4) ◽  
pp. 296-307
Author(s):  
Konstantin Krestovnikov ◽  
Aleksei Erashov ◽  
Аleksandr Bykov
Keyword(s):  
Pressure Sensor ◽  
Output Signal ◽  
Sensor Array ◽  
Applied Pressure ◽  
Pressure Sensors ◽  
Fine Tuning ◽  
Capacitive Pressure Sensor ◽  
Cell Parameters ◽  
Linear Pattern ◽  
Sensor Structure

This paper presents development of pressure sensor array with capacitance-type unit sensors, with scalable number of cells. Different assemblies of unit pressure sensors and their arrays were considered, their characteristics and fabrication methods were investigated. The structure of primary pressure transducer (PPT) array was presented; its operating principle of array was illustrated, calculated reference ratios were derived. The interface circuit, allowing to transform the changes in the primary transducer capacitance into voltage level variations, was proposed. A prototype sensor was implemented; the dependency of output signal power from the applied force was empirically obtained. In the range under 30 N it exhibited a linear pattern. The sensitivity of the array cells to the applied pressure is in the range 134.56..160.35. The measured drift of the output signals from the array cells after 10,000 loading cycles was 1.39%. For developed prototype of the pressure sensor array, based on the experimental data, the average signal-to-noise ratio over the cells was calculated, and equaled 63.47 dB. The proposed prototype was fabricated of easily available materials. It is relatively inexpensive and requires no fine-tuning of each individual cell. Capacitance-type operation type, compared to piezoresistive one, ensures greater stability of the output signal. The scalability and adjustability of cell parameters are achieved with layered sensor structure. The pressure sensor array, presented in this paper, can be utilized in various robotic systems.

scholarly journals Highly Sensitive Textile-Based Capacitive Pressure Sensors Using PVDF-HFP/Ionic Liquid Composite Films

Sensors ◽  
2021 ◽  
Vol 21 (2) ◽  
pp. 442
Author(s):  
Kyobin Keum ◽  
Jae Sang Heo ◽  
Jimi Eom ◽  
Keon Woo Lee ◽  
Sung Kyu Park ◽  
...  
Keyword(s):  
Ionic Liquid ◽  
Pressure Sensor ◽  
Sensor Array ◽  
Vinylidene Fluoride ◽  
Composite Films ◽  
Pressure Sensors ◽  
High Sensitivity ◽  
Capacitive Pressure Sensor ◽  
Electronic Textiles ◽  
Poly Vinylidene Fluoride

Textile-based pressure sensors have garnered considerable interest in electronic textiles due to their diverse applications, including human–machine interface and healthcare monitoring systems. We studied a textile-based capacitive pressure sensor array using a poly(vinylidene fluoride)-co-hexafluoropropylene (PVDF-HFP)/ionic liquid (IL) composite film. By constructing a capacitor structure with Ag-plated conductive fiber electrodes that are embedded in fabrics, a capacitive pressure sensor showing high sensitivity, good operation stability, and a wide sensing range could be created. By optimizing the PVDF-HFP:IL ratio (6.5:3.5), the fabricated textile pressure sensors showed sensitivity of 9.51 kPa−1 and 0.69 kPa−1 in the pressure ranges of 0–20 kPa and 20–100 kPa, respectively. The pressure-dependent capacitance variation in our device was explained based on the change in the contact-area formed between the multi-filament fiber electrodes and the PVDF-HFP/IL film. To demonstrate the applicability and scalability of the sensor device, a 3 × 3 pressure sensor array was fabricated. Due to its matrix-type array structure and capacitive sensing mechanism, multi-point detection was possible, and the different positions and the weights of the objects could be identified.

scholarly journals Soft Bimodal Sensor Array Based on Conductive Hydrogel for Driving Status Monitoring

Sensors ◽  
2020 ◽  
Vol 20 (6) ◽  
pp. 1641
Author(s):  
Wentao Dong ◽  
Daojin Yao ◽  
Lin Yang
Keyword(s):  
Pressure Sensor ◽  
Sensor Array ◽  
Sol Gel ◽  
Strain Sensor ◽  
Gauge Factor ◽  
Hand Gesture ◽  
Capacitive Pressure Sensor ◽  
Wearable Electronics ◽  
Status Monitoring ◽  
Hand Gesture Detection

Driving status monitoring is important to safety driving which could be adopted to improve driving behaviors through hand gesture detection by wearable electronics. The soft bimodal sensor array (SBSA) composed of strain sensor array based on ionic conductive hydrogels and capacitive pressure sensor array based on ionic hydrogel electrodes is designed to monitor drivers’ hand gesture. SBSA is fabricated and assembled by the stretchable functional and structural materials through a sol–gel process for guaranteeing the overall softness of SBSA. The piezoresistive strain and capacitive pressure sensing abilities of SBSA are evaluated by the data acquisition system and signal analyzer with the external physical stimuli. The gauge factor (GF) of the strain sensor is 1.638 under stretched format, and –0.726 under compressed format; sensitivity of the pressure sensor is 0.267 kPa−1 below 3.45 and 0.0757 kPa−1 in the range of 3.45–12 kPa, which are sensitive enough to hand gesture detection and driving status monitoring. The simple recognition method for the driver’s status behavior is proposed to identify the driver’s behaviors with the piezoresistive properties of conductive polymers, and the turning angles are computed by the strain and pressure values from SBSA. This work demonstrates an effective approach to integrate SBSA seamlessly into an existing driving environment for driving status monitoring, expanding the applications of SBSA in wearable electronics.

scholarly journals Novel Design and Fabrication of High Sensitivity MEMS Capacitive Sensor Array for Fingerprint Imaging

2009 ◽  
Vol 74 ◽  
pp. 239-242 ◽  
Author(s):  
Mitra Damghanian ◽  
Burhanuddin Yeop Majlis
Keyword(s):  
Pressure Sensor ◽  
Sensor Array ◽  
Fem Analysis ◽  
High Sensitivity ◽  
Capacitive Sensor ◽  
Capacitive Pressure Sensor ◽  
Structural Modifications ◽  
Enhanced Sensitivity ◽  
Sensor Structure ◽  
Novel Design

A novel MEMS capacitive pressure sensor array is designed and fabricated for fingerprint acquisition application. Based on analytical investigations and FEM analysis, the designed structure of pressure sensor cells assist from an aluminum clamped-clamped wide beam as the movable electrode of variant capacitor, instead of usual membrane structure. A rectangular base T-shape protrusion is also used on top of the deflecting electrode to concentrate pressure and increase the sensitivity. Proven by the real test of the fabricated sensor structure, this design has enhanced sensitivity and linearity of the device compared to all membrane based reported prototypes without crossing the dpi limits. Structural modifications have resulted in a simpler fabrication process as well.

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