An electrostatic micro actuator for a magnetic head tracking system of hard disk drives
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2006 ◽
Vol 24
(3-4)
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pp. 247-259
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2012 ◽
Vol 18
(9-10)
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pp. 1309-1317
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2014 ◽
Vol 50
(5)
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pp. 1-7
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2013 ◽
Vol 19
(9-10)
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pp. 1697-1704
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1994 ◽
Vol 30
(6)
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pp. 4161-4163
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