An electrostatic microactuator using LIGA process for a magnetic head tracking system of hard disk drives
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2014 ◽
Vol 50
(5)
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pp. 1-7
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1994 ◽
Vol 30
(6)
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pp. 4161-4163
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2020 ◽
Vol 67
(11)
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pp. 9184-9194
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1999 ◽
Vol 119
(5)
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pp. 728-734
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