Novel Scalable Nano-and Micro-High-Aspect Ratio Structure (HARS) Biocomposites Generated under Physiological Conditions

2016 32nd Southern Biomedical Engineering Conference (SBEC) ◽

10.1109/sbec.2016.72 ◽

2016 ◽

Author(s):

Mark A. DeCoster

Keyword(s):

Aspect Ratio ◽

High Aspect Ratio ◽

Physiological Conditions ◽

High Aspect Ratio Structure

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High-aspect-ratio structure formation techniques for three-dimensional metal-oxide-semiconductor transistors

Microelectronic Engineering ◽

10.1016/j.mee.2006.01.270 ◽

2006 ◽

Vol 83 (4-9) ◽

pp. 1740-1744 ◽

Cited By ~ 1

Author(s):

Hideo Sunami ◽

Shunpei Matsumura ◽

Koji Yoshikawa ◽

Kiyoshi Okuyama

Keyword(s):

Aspect Ratio ◽

Metal Oxide ◽

Structure Formation ◽

High Aspect Ratio ◽

Three Dimensional ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

High Aspect Ratio Structure

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Influence of e-beam aperture angle on CD-SEM measurements for high-aspect ratio structure

Metrology, Inspection, and Process Control for Microlithography XXXII ◽

10.1117/12.2296756 ◽

2018 ◽

Cited By ~ 1

Author(s):

Kouichi Kurosawa ◽

Daisuke Bizen ◽

Makoto Sakakibara ◽

Makoto Suzuki ◽

Uki Ikeda ◽

...

Keyword(s):

Aspect Ratio ◽

High Aspect Ratio ◽

Aperture Angle ◽

High Aspect Ratio Structure ◽

Beam Aperture

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Micro hot embossing for high-aspect-ratio structure with materials flow enhancement by polymer sheet

10.1117/12.522898 ◽

2004 ◽

Cited By ~ 1

Author(s):

Yoichi Murakoshi ◽

Xue-Chuan Shan ◽

Toshio Sano ◽

Masaharu Takahashi ◽

Ryutaro Maeda

Keyword(s):

Aspect Ratio ◽

High Aspect Ratio ◽

Hot Embossing ◽

Polymer Sheet ◽

High Aspect Ratio Structure ◽

Flow Enhancement ◽

Materials Flow

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High-Aspect-Ratio Structure Fabrication on (110)-Oriented Silicon Surfaces Using Tribo-Nanolithography

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2010.2158 ◽

2010 ◽

Vol 10 (4) ◽

pp. 2394-2400 ◽

Cited By ~ 1

Author(s):

Noritaka Kawasegi ◽

Noboru Morita

Keyword(s):

Aspect Ratio ◽

High Aspect Ratio ◽

Silicon Surfaces ◽

High Aspect Ratio Structure

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Saturation profile measurement of atomic layer deposited film by X-ray microanalysis on lateral high-aspect-ratio structure

Applied Surface Science Advances ◽

10.1016/j.apsadv.2021.100102 ◽

2021 ◽

Vol 5 ◽

pp. 100102

Author(s):

Eero Haimi ◽

Oili M.E. Ylivaara ◽

Jihong Yim ◽

Riikka L. Puurunen

Keyword(s):

Aspect Ratio ◽

High Aspect Ratio ◽

Atomic Layer ◽

Profile Measurement ◽

X Ray ◽

High Aspect Ratio Structure ◽

Deposited Film ◽

Saturation Profile

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P1–32: Calculation of the enhancement factor for a high-aspect ratio structure

International Vacuum Nanoelectronics Conference ◽

10.1109/ivnc.2010.5563164 ◽

2010 ◽

Author(s):

Lucian D. Filip ◽

David J. Carey ◽

Ravi Silva

Keyword(s):

Aspect Ratio ◽

High Aspect Ratio ◽

Enhancement Factor ◽

High Aspect Ratio Structure

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UV-LIGA process for high aspect ratio structure using stress barrier and C-shaped etch hole

Sensors and Actuators A Physical ◽

10.1016/s0924-4247(00)00408-8 ◽

2000 ◽

Vol 84 (3) ◽

pp. 342-350 ◽

Cited By ~ 64

Author(s):

Hyun-Kee Chang ◽

Yong-Kweon Kim

Keyword(s):

Aspect Ratio ◽

High Aspect Ratio ◽

High Aspect Ratio Structure

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A single crystal silicon micro-Pirani vacuum gauge with high aspect ratio structure

Sensors and Actuators A Physical ◽

10.1016/j.sna.2010.08.015 ◽

2010 ◽

Vol 163 (1) ◽

pp. 159-163 ◽

Cited By ~ 17

Author(s):

Wei Jiang ◽

Xin Wang ◽

Jinwen Zhang

Keyword(s):

Aspect Ratio ◽

Single Crystal ◽

High Aspect Ratio ◽

Single Crystal Silicon ◽

Vacuum Gauge ◽

Crystal Silicon ◽

High Aspect Ratio Structure

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Fabrication of high aspect ratio structure and its releasing for silicon on insulator MEMS/MOEMS device application

Journal of Micro/Nanolithography MEMS and MOEMS ◽

10.1117/1.jmm.14.2.024502 ◽

2015 ◽

Vol 14 (2) ◽

pp. 024502 ◽

Cited By ~ 1

Author(s):

Ji Fan ◽

Wen Ting Zhang ◽

Jin Quan Liu ◽

Wen Jie Wu ◽

Tao Zhu ◽

...

Keyword(s):

Aspect Ratio ◽

High Aspect Ratio ◽

Silicon On Insulator ◽

Device Application ◽

High Aspect Ratio Structure

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Suppressing the burr of high aspect ratio structure by optimizing the cutting parameters in the micro-milling process

The International Journal of Advanced Manufacturing Technology ◽

10.1007/s00170-020-06088-x ◽

2020 ◽

Vol 111 (3-4) ◽

pp. 985-997

Author(s):

Ni Chen ◽

Xinlei Zhang ◽

Jinming Wu ◽

Yang Wu ◽

Liang Li ◽

...

Keyword(s):

Aspect Ratio ◽

High Aspect Ratio ◽

Cutting Parameters ◽

Milling Process ◽

Micro Milling ◽

High Aspect Ratio Structure

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