Influence of e-beam aperture angle on CD-SEM measurements for high-aspect ratio structure

2018 ◽  
Author(s):  
Kouichi Kurosawa ◽  
Daisuke Bizen ◽  
Makoto Sakakibara ◽  
Makoto Suzuki ◽  
Uki Ikeda ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Aperture Angle ◽  
High Aspect Ratio Structure ◽  
Beam Aperture

Micro hot embossing for high-aspect-ratio structure with materials flow enhancement by polymer sheet

2004 ◽  
Author(s):  
Yoichi Murakoshi ◽  
Xue-Chuan Shan ◽  
Toshio Sano ◽  
Masaharu Takahashi ◽  
Ryutaro Maeda
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Hot Embossing ◽  
Polymer Sheet ◽  
High Aspect Ratio Structure ◽  
Flow Enhancement ◽  
Materials Flow
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