Sensor location, identification, and multivariable iterative learning control of an RTP process for maximum uniformity of wafer temperature distribution

11th IEEE International Conference on Advanced Thermal Processing of Semiconductors. RTP 2003 ◽

10.1109/rtp.2003.1249145 ◽

2004 ◽

Cited By ~ 1

Author(s):

M. Cho ◽

Y. Lee ◽

S. Joo ◽

K.S. Lee

Keyword(s):

Temperature Distribution ◽

Iterative Learning Control ◽

Learning Control ◽

Iterative Learning ◽

Sensor Location ◽

Wafer Temperature ◽

Location Identification

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Control of Wafer Temperature Uniformity in Rapid Thermal Processing Using an Optimal Iterative Learning Control Technique

IFAC Proceedings Volumes ◽

10.1016/s1474-6670(17)38529-4 ◽

2000 ◽

Vol 33 (10) ◽

pp. 123-128 ◽

Cited By ~ 1

Author(s):

Jinho Lee ◽

Insik Chin ◽

Kwang S. Lee ◽

Jinhoon Choi ◽

Jay H. Lee

Keyword(s):

Thermal Processing ◽

Iterative Learning Control ◽

Rapid Thermal Processing ◽

Learning Control ◽

Iterative Learning ◽

Control Technique ◽

Temperature Uniformity ◽

Wafer Temperature

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Control of Wafer Temperature Uniformity in Rapid Thermal Processing Using an Optimal Iterative Learning Control Technique

Industrial & Engineering Chemistry Research ◽

10.1021/ie0005553 ◽

2001 ◽

Vol 40 (7) ◽

pp. 1661-1672 ◽

Cited By ~ 37

Author(s):

Kwang S. Lee ◽

Jinho Lee ◽

Insik Chin ◽

Jinhoon Choi ◽

Jay H. Lee

Keyword(s):

Thermal Processing ◽

Iterative Learning Control ◽

Rapid Thermal Processing ◽

Learning Control ◽

Iterative Learning ◽

Control Technique ◽

Temperature Uniformity ◽

Wafer Temperature

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OPTIMAL ITERATIVE LEARNING CONTROL OF WAFER TEMPERATURE UNIFORMITY IN RAPID THERMAL PROCESSING

IFAC Proceedings Volumes ◽

10.3182/20020721-6-es-1901.00624 ◽

2002 ◽

Vol 35 (1) ◽

pp. 333-338

Author(s):

Kwang S. Lee ◽

Hyojin Ahn ◽

In sik Chin ◽

Jay H. Lee ◽

Dae R. Yang

Keyword(s):

Thermal Processing ◽

Iterative Learning Control ◽

Rapid Thermal Processing ◽

Learning Control ◽

Iterative Learning ◽

Temperature Uniformity ◽

Wafer Temperature

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Robust sensor location for parameter estimation in iterative learning control of spatio-temporal systems

2017 10th International Workshop on Multidimensional (nD) Systems (nDS) ◽

10.1109/nds.2017.8070628 ◽

2017 ◽

Author(s):

Damian Kowalow ◽

Maciej Patan

Keyword(s):

Parameter Estimation ◽

Iterative Learning Control ◽

Learning Control ◽

Iterative Learning ◽

Sensor Location ◽

Spatio Temporal

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Experimental application of a quadratic optimal iterative learning control method for control of wafer temperature uniformity in rapid thermal processing

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2002.807740 ◽

2003 ◽

Vol 16 (1) ◽

pp. 36-44 ◽

Cited By ~ 52

Author(s):

Dae Ryook Yang ◽

Kwang Soon Lee ◽

Hyo Jin Ahn ◽

J.H. Lee

Keyword(s):

Thermal Processing ◽

Iterative Learning Control ◽

Control Method ◽

Rapid Thermal Processing ◽

Learning Control ◽

Iterative Learning ◽

Temperature Uniformity ◽

Wafer Temperature ◽

Experimental Application

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Optimal iterative learning control of wafer temperature uniformity in rapid thermal processing

ISIE 2001. 2001 IEEE International Symposium on Industrial Electronics Proceedings (Cat. No.01TH8570) ◽

10.1109/isie.2001.931654 ◽

2002 ◽

Author(s):

In Sik Chin ◽

Jinho Lee ◽

Hyojin Ahn ◽

Sangrae Joo ◽

K.S. Lee ◽

...

Keyword(s):

Thermal Processing ◽

Iterative Learning Control ◽

Rapid Thermal Processing ◽

Learning Control ◽

Iterative Learning ◽

Temperature Uniformity ◽

Wafer Temperature

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Multi-channel design for iterative learning control

Proceedings of the 2004 American Control Conference ◽

10.23919/acc.2004.1384667 ◽

2004 ◽

Author(s):

Yongqiang Ye ◽

Danwei Wang

Keyword(s):

Iterative Learning Control ◽

Learning Control ◽

Iterative Learning ◽

Channel Design

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Impact of Measurement Noise on Networked Iterative Learning Control Systems

2019 Chinese Control Conference (CCC) ◽

10.23919/chicc.2019.8866335 ◽

2019 ◽

Author(s):

Yamiao Zhang ◽

Jian Liu ◽

Xiaoe Ruan

Keyword(s):

Control Systems ◽

Iterative Learning Control ◽

Learning Control ◽

Iterative Learning ◽

Measurement Noise

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Design of Iterative Learning Control to suppress the disturbances in Bus Suspension

i-manager’s Journal on Instrumentation and Control Engineering ◽

10.26634/jic.1.2.2230 ◽

2013 ◽

Vol 1 (2) ◽

pp. 1-7

Author(s):

Swati Gaur ◽

◽

Sheilza Aggarwal ◽

Keyword(s):

Iterative Learning Control ◽

Learning Control ◽

Iterative Learning

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Two-dimensional Model Predictive Iterative Learning Control Scheme Based on a Two-dimensional Performance Model

ACTA AUTOMATICA SINICA ◽

10.3724/sp.j.1004.2013.00565 ◽

2014 ◽

Vol 39 (5) ◽

pp. 565-573 ◽

Cited By ~ 2

Author(s):

Jia SHI ◽

Qing-Yin JIANG ◽

Zhi-Kai CAO ◽

Hua ZHOU ◽

Fu-Rong GAO

Keyword(s):

Iterative Learning Control ◽

Learning Control ◽

Iterative Learning ◽

Performance Model ◽

Two Dimensional ◽

Dimensional Model ◽

Control Scheme ◽

Two Dimensional Model

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