Experimental application of a quadratic optimal iterative learning control method for control of wafer temperature uniformity in rapid thermal processing
2003 ◽
Vol 16
(1)
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pp. 36-44
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2000 ◽
Vol 33
(10)
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pp. 123-128
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2001 ◽
Vol 40
(7)
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pp. 1661-1672
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2020 ◽
Vol 20
(1)
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pp. 84-92
2017 ◽
Vol 7
(4)
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pp. 179-186
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2019 ◽
Vol 233
(9)
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pp. 1221-1238