Mechanisms for electron energy transport and electron energy distributions in magnetically enhanced inductively coupled plasmas

Control of electron energy distributions in inductively coupled plasmas using tandem sources

2013 Abstracts IEEE International Conference on Plasma Science (ICOPS) ◽

10.1109/plasma.2013.6634887 ◽

2013 ◽

Author(s):

Michael D. Logue ◽

Mark J. Kushner ◽

Weiye Zhu ◽

Hyungjoo Shin ◽

Lei Liu ◽

...

Keyword(s):

Electron Energy ◽

Inductively Coupled Plasmas ◽

Energy Distributions ◽

Inductively Coupled ◽

Coupled Plasmas

Download Full-text

Comparison of pressure dependence of electron energy distributions in oxygen capacitively and inductively coupled plasmas

Physical Review E ◽

10.1103/physreve.81.046402 ◽

2010 ◽

Vol 81 (4) ◽

Cited By ~ 25

Author(s):

Min-Hyong Lee ◽

Hyo-Chang Lee ◽

Chin-Wook Chung

Keyword(s):

Electron Energy ◽

Pressure Dependence ◽

Inductively Coupled Plasmas ◽

Energy Distributions ◽

Inductively Coupled ◽

Coupled Plasmas

Download Full-text

Angular anisotropy of electron energy distributions in inductively coupled plasmas

Journal of Applied Physics ◽

10.1063/1.1614428 ◽

2003 ◽

Vol 94 (9) ◽

pp. 5522-5529 ◽

Cited By ~ 13

Author(s):

Alex V. Vasenkov ◽

Mark J. Kushner

Keyword(s):

Electron Energy ◽

Inductively Coupled Plasmas ◽

Angular Anisotropy ◽

Energy Distributions ◽

Inductively Coupled ◽

Coupled Plasmas

Download Full-text

Electron energy distributions and electron impact source functions in Ar/N2 inductively coupled plasmas using pulsed power

Journal of Applied Physics ◽

10.1063/1.4904935 ◽

2015 ◽

Vol 117 (4) ◽

pp. 043301 ◽

Cited By ~ 8

Author(s):

Michael D. Logue ◽

Mark J. Kushner

Keyword(s):

Electron Impact ◽

Electron Energy ◽

Pulsed Power ◽

Inductively Coupled Plasmas ◽

Energy Distributions ◽

Inductively Coupled ◽

Coupled Plasmas

Download Full-text

Optical diagnostics for characterization of electron energy distributions: argon inductively coupled plasmas

Plasma Sources Science and Technology ◽

10.1088/0963-0252/20/5/055006 ◽

2011 ◽

Vol 20 (5) ◽

pp. 055006 ◽

Cited By ~ 25

Author(s):

John B Boffard ◽

R O Jung ◽

Chun C Lin ◽

L E Aneskavich ◽

A E Wendt

Keyword(s):

Electron Energy ◽

Optical Diagnostics ◽

Inductively Coupled Plasmas ◽

Energy Distributions ◽

Inductively Coupled ◽

Coupled Plasmas

Download Full-text

Optical emission measurements of electron energy distributions in low-pressure argon inductively coupled plasmas

Plasma Sources Science and Technology ◽

10.1088/0963-0252/19/6/065001 ◽

2010 ◽

Vol 19 (6) ◽

pp. 065001 ◽

Cited By ~ 60

Author(s):

John B Boffard ◽

R O Jung ◽

Chun C Lin ◽

A E Wendt

Keyword(s):

Electron Energy ◽

Optical Emission ◽

Low Pressure ◽

Inductively Coupled Plasmas ◽

Energy Distributions ◽

Inductively Coupled ◽

Coupled Plasmas

Download Full-text

Influence of electron-electron collisions on electron energy distributions and transport in inductively coupled plasmas

IEEE Conference Record - Abstracts 2002 IEEE International Conference on Plasma Science (Cat No 02CH37340) PLASMA-02 ◽

10.1109/plasma.2002.1030237 ◽

2003 ◽

Author(s):

A. Vasenkov ◽

M.J. Kushner

Keyword(s):

Electron Energy ◽

Inductively Coupled Plasmas ◽

Energy Distributions ◽

Electron Collisions ◽

Inductively Coupled ◽

Coupled Plasmas

Download Full-text

Modeling argon inductively coupled plasmas: The electron energy distribution function and metastable kinetics

Journal of Applied Physics ◽

10.1063/1.1452772 ◽

2002 ◽

Vol 91 (6) ◽

pp. 3539-3546 ◽

Cited By ~ 55

Author(s):

Mark W. Kiehlbauch ◽

David B. Graves

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Coupled Plasmas

Download Full-text

Lorentz force effect on electron energy distribution in low pressure inductively coupled plasmas

IEEE Conference Record - Abstracts. PPPS-2001 Pulsed Power Plasma Science 2001. 28th IEEE International Conference on Plasma Science and 13th IEEE International Pulsed Power Conference (Cat. No.01CH37255) ◽

10.1109/ppps.2001.961052 ◽

2002 ◽

Author(s):

V.I. Kolobov ◽

V.A. Godyak

Keyword(s):

Energy Distribution ◽

Electron Energy ◽

Lorentz Force ◽

Low Pressure ◽

Electron Energy Distribution ◽

Inductively Coupled Plasmas ◽

Force Effect ◽

Inductively Coupled ◽

Coupled Plasmas

Download Full-text

Ion energy distributions in inductively coupled plasmas having a biased boundary electrode

Plasma Sources Science and Technology ◽

10.1088/0963-0252/21/6/065009 ◽

2012 ◽

Vol 21 (6) ◽

pp. 065009 ◽

Cited By ~ 18

Author(s):

Michael D Logue ◽

Hyungjoo Shin ◽

Weiye Zhu ◽

Lin Xu ◽

Vincent M Donnelly ◽

...

Keyword(s):

Inductively Coupled Plasmas ◽

Energy Distributions ◽

Ion Energy ◽

Inductively Coupled ◽

Ion Energy Distributions ◽

Coupled Plasmas

Download Full-text