Impact of F species on plasma charge damage in a RF asher

7th International Symposium on Plasma- and Process-Induced Damage ◽

10.1109/ppid.2002.1042616 ◽

2003 ◽

Cited By ~ 2

Author(s):

S.Q. Gu ◽

R. Fujimoto ◽

P. McGrath

Download Full-text