Direct experimental determination and modeling of VUV induced bulk conduction in dielectrics during plasma processing
1989 ◽
Vol 47
◽
pp. 552-553
1979 ◽
Vol 40
(C7)
◽
pp. C7-709-C7-710
Keyword(s):
2010 ◽
Vol 130
(10)
◽
pp. 1817-1818
Keyword(s):
High Temperature Material Processes An International Quarterly of High-Technology Plasma Processes
◽
2019 ◽
Vol 23
(1)
◽
pp. 25-36
Keyword(s):
High Temperature Material Processes An International Quarterly of High-Technology Plasma Processes
◽
2016 ◽
Vol 20
(1)
◽
pp. 59-83