Bias-plasma interaction in pulsed plasmas and its relation to damage mechanisms
2006 ◽
Vol 133
◽
pp. 549-551
◽
1979 ◽
Vol 40
(C7)
◽
pp. C7-745-C7-746
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Keyword(s):
Keyword(s):
2021 ◽
pp. 106458
Keyword(s):