Low cost, high G, micro electro-mechanical systems (MEMS), inertial measurements unit (IMU) program

2003 ◽  
Author(s):  
A. Warnasch ◽  
A. Killen
Keyword(s):  
Low Cost ◽  
Mechanical Systems ◽  
Micro Electro Mechanical Systems ◽  
Inertial Measurements

scholarly journals Micro-electro-mechanical systems (MEMS): Technology for the 21st century

2014 ◽  
Vol 68 (5) ◽  
pp. 629-641 ◽  
Author(s):  
Tatjana Djakov ◽  
Ivanka Popovic ◽  
Ljubinka Rajakovic
Keyword(s):  
21St Century ◽  
Low Cost ◽  
Mechanical Systems ◽  
Modern Society ◽  
Global Scale ◽  
Thermal Constant ◽  
Mems Devices ◽  
Micro Electro Mechanical Systems ◽  
Industrial Sectors ◽  
Mems Technology

Micro-electro-mechanical systems (MEMS) are miniturized devices that can sense the environment, process and analyze information, and respond with a variety of mechanical and electrical actuators. MEMS consists of mechanical elements, sensors, actuators, electrical and electronics devices on a common silicon substrate. Micro-electro-mechanical systems are becoming a vital technology for modern society. Some of the advantages of MEMS devices are: very small size, very low power consumption, low cost, easy to integrate into systems or modify, small thermal constant, high resistance to vibration, shock and radiation, batch fabricated in large arrays, improved thermal expansion tolerance. MEMS technology is increasingly penetrating into our lives and improving quality of life, similar to what we experienced in the microelectronics revolution. Commercial opportunities for MEMS are rapidly growing in broad application areas, including biomedical, telecommunication, security, entertainment, aerospace, and more in both the consumer and industrial sectors on a global scale. As a breakthrough technology, MEMS is building synergy between previously unrelated fields such as biology and microelectronics. Many new MEMS and nanotechnology applications will emerge, expanding beyond that which is currently identified or known. MEMS are definitely technology for 21st century.

Identification of Vibration Parameters of Mechanical System Utilizing Low-Cost MEMS Accelerometers

2019 ◽  
Vol 894 ◽  
pp. 1-8
Author(s):  
Khanh Duong Quang ◽  
Huong Vuong Thi ◽  
Anh Luu Van
Keyword(s):  
High Speed ◽  
Low Cost ◽  
Damping Ratio ◽  
Vibration Reduction ◽  
Mechanical Systems ◽  
Micro Electro Mechanical Systems ◽  
Mems Accelerometer ◽  
System Parameters ◽  
Mems Accelerometers ◽  
Vibration Parameters

Multi-axial mechanical systems commonly encounter the problem of vibration while attempting to drive machining systems at high speed. Many effective methods based on feed-forward and feedback control have been proposed and applied for vibration reduction. In order to design controllers all methods require the exact knowledge of system parameters: vibration frequency and damping ratio. In recent years, low-cost Micro Electro Mechanical Systems (MEMS) accelerometers have been used for many applications in industry. This paper presents the advantage of low cost MEMS accelerometer to identify vibration parameters of mechanical systems in comparison to conventional expensive devices.

Simulation of Gold Nanoparticles Aggravating MEMS Cantilever Optical Static Detection Biochip

2013 ◽  
Vol 694-697 ◽  
pp. 966-970 ◽  
Author(s):  
Yue Tao Ge ◽  
Xiao Tong Yin
Keyword(s):  
Gold Nanoparticles ◽  
Low Cost ◽  
Mechanical Systems ◽  
Side Wall ◽  
High Sensitivity ◽  
Detection Sensitivity ◽  
Gene Detection ◽  
Micro Electro Mechanical Systems ◽  
Target Dna ◽  
Static Detection

A kind of gene detection biochip model based on biological micro electro mechanical systems (BioMEMS) technology and micro optical electro mechanical systems (MOEMS) technology is designed and simulated. In order to detect whether there are nucleic acid components in the testing samples, the biochip in this study issues horizontal light by laser, then receives and reads the deformation signals of MEMS cantilever by optical detector. The MEMS optical reflecting system can amplify MEMS cantilever deformation signal 22 times by micro reflectors which are set on the side wall of the cantilever free end. In order to improve optical detection sensitivity, gold nanoparticles (GNPs) which are combined with hybridization information is taken to aggravate MEMS cantilever, and employ Au - S chemical bond of GNPs and dithiol HS(CH2)6SH to combine and fix DNA probe, and then employ target DNA which is marked with biotin to combine GNPs by Biotin - Streptavidin combining. The simulation results show that this biochip can detect biological samples fast, high throughput, low cost, high sensitivity and reliably.

A Novel Embedded Root Method to Construct Thick Metal Microstructures Using SU-8 in UV-LIGA Process

2002 ◽  
Author(s):  
Chien-Hung Ho ◽  
Kan-Ping Chin
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Electrostatic Force ◽  
Low Cost ◽  
Three Dimensional ◽  
Mechanical Systems ◽  
Improved Method ◽  
Micro Electro Mechanical Systems ◽  
Novel Technique

To upgrade the electrostatic force, movable devices in micro-electro-mechanical systems may require three-dimensional microstructures with large capacitive areas and vertical sidewalls with several hundred micrometers in height. The photoresist, NANO™ XP SU–8, can be implemented in the fabrication of high-aspect-ratio microstructures in low-cost MEMS production. In this study, using SU-8 as an electroplating mold, an improved method for consolidating the adhesion of the plated microstructures to the substrate is utilized. By constructing an embedded root as the substructure, this novel technique can greatly increase the thickness of the metal components, and simultaneously, the hard-to-strip crosslinked SU-8 may be removed completely. The fabrication of stators and bearing post for an electrostatic micro motor is used here to demonstrate the effectiveness of the proposed method, where the structural height and the minimum gap of the stators are 300 μm and 50 μm, respectively. For comparison, some fabricated results of typical approaches by a heated remover to strip the cured SU-8 mold are also shown in this paper.

scholarly journals Evaluation of a Micro-Electro Mechanical Systems Spectral Sensor for Soil Properties Estimation

Land ◽  
2021 ◽  
Vol 10 (1) ◽  
pp. 63
Author(s):  
Konstantinos Karyotis ◽  
Theodora Angelopoulou ◽  
Nikolaos Tziolas ◽  
Evgenia Palaiologou ◽  
Nikiforos Samarinas ◽  
...  
Keyword(s):  
Soil Properties ◽  
Soil Analysis ◽  
Low Cost ◽  
Mechanical Systems ◽  
Least Squares Regression ◽  
Micro Electro Mechanical Systems ◽  
Spectral Angle Mapper ◽  
Mems Sensor ◽  
Laboratory Techniques ◽  
Non Destructive

Soil properties estimation with the use of reflectance spectroscopy has met major advances over the last decades. Their non-destructive nature and their high accuracy capacity enabled a breakthrough in the efficiency of performing soil analysis against conventional laboratory techniques. As the need for rapid, low cost, and accurate soil properties’ estimations increases, micro electro mechanical systems (MEMS) have been introduced and are becoming applicable for informed decision making in various domains. This work presents the assessment of a MEMS sensor (1750–2150 nm) in estimating clay and soil organic carbon (SOC) contents. The sensor was first tested under various experimental setups (different working distances and light intensities) through its similarity assessment (Spectral Angle Mapper) to the measurements of a spectroradiometer of the full 350–2500 nm range that was used as reference. MEMS performance was evaluated over spectra measured from 102 samples in laboratory conditions. Models’ calibrations were performed using random forest (RF) and partial least squares regression (PLSR). The results provide insights that MEMS could be employed for soil properties estimation, since the RF model demonstrated solid performance over both clay (R2 = 0.85) and SOC (R2 = 0.80). These findings pave the way for supporting daily agriculture applications and land related policies through the exploration of a wider set of soil properties.

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