Preparation, Characterization, Insulation Study of Al2O3 Thin Film Deposited by Dual Ion Beam Sputtering

2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) ◽

10.1109/nems.2018.8556912 ◽

2018 ◽

Author(s):

Xingkai Lin ◽

Yanlei Wang ◽

Guifu Ding ◽

Congchun Zhang

Keyword(s):

Thin Film ◽

Ion Beam ◽

Ion Beam Sputtering ◽

Beam Sputtering ◽

Dual Ion Beam Sputtering

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Effect of assisted ion energy on properties of silicon oxide thin film deposited by dual ion-beam sputtering

Journal of Applied Polymer Science ◽

10.1002/app.26338 ◽

2007 ◽

Vol 105 (5) ◽

pp. 2444-2452 ◽

Cited By ~ 1

Author(s):

Jin-Wook Seong ◽

Daiwon Choi

Keyword(s):

Thin Film ◽

Silicon Oxide ◽

Ion Beam ◽

Oxide Thin Film ◽

Ion Beam Sputtering ◽

Ion Energy ◽

Beam Sputtering ◽

Dual Ion Beam Sputtering

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Deposition Characteristics of AlN Thin Film Prepared by the Dual Ion Beam Sputtering System

Journal of Electronic Materials ◽

10.1007/s11664-006-0023-2 ◽

2006 ◽

Vol 36 (1) ◽

pp. 81-87 ◽

Cited By ~ 10

Author(s):

T. L. Hu ◽

S. W. Mao ◽

C. P. Chao ◽

M. F. Wu ◽

H. L. Huang ◽

...

Keyword(s):

Thin Film ◽

Ion Beam ◽

Ion Beam Sputtering ◽

Beam Sputtering ◽

Dual Ion Beam Sputtering ◽

Sputtering System

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Thin film deposition from dual ion beam sputtering system

CSI Transactions on ICT ◽

10.1007/s40012-019-00253-8 ◽

2019 ◽

Vol 7 (2) ◽

pp. 99-104

Author(s):

Shaibal Mukherjee

Keyword(s):

Thin Film ◽

Ion Beam ◽

Thin Film Deposition ◽

Film Deposition ◽

Ion Beam Sputtering ◽

Beam Sputtering ◽

Dual Ion Beam Sputtering ◽

Sputtering System

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Phase control and Young’s modulus of tungsten thin film prepared by dual ion beam sputtering deposition

AIP Advances ◽

10.1063/1.5021009 ◽

2018 ◽

Vol 8 (3) ◽

pp. 035321 ◽

Cited By ~ 7

Author(s):

Fei Zhu ◽

Zheng Xie ◽

Zhengjun Zhang

Keyword(s):

Thin Film ◽

Young’S Modulus ◽

Young's Modulus ◽

Ion Beam ◽

Phase Control ◽

Ion Beam Sputtering ◽

Sputtering Deposition ◽

Beam Sputtering ◽

Dual Ion Beam Sputtering

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Microstructure and Young's modulus of ZrN thin film prepared by dual ion beam sputtering deposition

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2019.06.094 ◽

2019 ◽

Vol 374 ◽

pp. 997-1005 ◽

Cited By ~ 4

Author(s):

Fei Zhu ◽

Kangwei Zhu ◽

Yin Hu ◽

Yunhan Ling ◽

Dong Wang ◽

...

Keyword(s):

Thin Film ◽

Young’S Modulus ◽

Young's Modulus ◽

Ion Beam ◽

Ion Beam Sputtering ◽

Sputtering Deposition ◽

Beam Sputtering ◽

Dual Ion Beam Sputtering

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New gas sensing mechanism for SnO2 thin-film gas sensors fabricated by using dual ion beam sputtering

Sensors and Actuators B Chemical ◽

10.1016/s0925-4005(01)00731-6 ◽

2001 ◽

Vol 77 (1-2) ◽

pp. 200-208 ◽

Cited By ~ 48

Author(s):

Yong-Sahm Choe

Keyword(s):

Thin Film ◽

Gas Sensors ◽

Gas Sensing ◽

Ion Beam ◽

Sno2 Thin Film ◽

Ion Beam Sputtering ◽

Sensing Mechanism ◽

Beam Sputtering ◽

Dual Ion Beam Sputtering

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CIGS thin film Deposition by Dual Ion Beam Sputtering (DIBS) system for Solar cell Applications

Physics of Semiconductor Devices - Environmental Science and Engineering ◽

10.1007/978-3-319-03002-9_100 ◽

2014 ◽

pp. 399-401

Author(s):

Shaibal Mukherjee ◽

Vishnu Awasthi ◽

Sushil K. Pandey ◽

Saurabh K. Pandey ◽

Shruti Verma ◽

...

Keyword(s):

Thin Film ◽

Solar Cell ◽

Ion Beam ◽

Thin Film Deposition ◽

Film Deposition ◽

Ion Beam Sputtering ◽

Cigs Thin Film ◽

Beam Sputtering ◽

Dual Ion Beam Sputtering

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Effect of oxygen content on barrier properties of silicon oxide thin film deposited by dual ion-beam sputtering

Journal of Non-Crystalline Solids ◽

10.1016/j.jnoncrysol.2005.10.024 ◽

2006 ◽

Vol 352 (1) ◽

pp. 84-91 ◽

Cited By ~ 2

Author(s):

Jin-Wook Seong ◽

Dai Won Choi ◽

K.H. Yoon

Keyword(s):

Thin Film ◽

Oxygen Content ◽

Silicon Oxide ◽

Ion Beam ◽

Barrier Properties ◽

Oxide Thin Film ◽

Ion Beam Sputtering ◽

Beam Sputtering ◽

Effect Of Oxygen ◽

Dual Ion Beam Sputtering

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Influence of ion beam parameters onto two-dimensional optical thin film thickness distributions deposited by ion beam sputtering

Thin Solid Films ◽

10.1016/j.tsf.2019.05.027 ◽

2019 ◽

Vol 682 ◽

pp. 109-120 ◽

Cited By ~ 2

Author(s):

Wjatscheslaw Sakiew ◽

Stefan Schrameyer ◽

Marco Jupé ◽

Philippe Schwerdtner ◽

Nick Erhart ◽

...

Keyword(s):

Thin Film ◽

Film Thickness ◽

Ion Beam ◽

Two Dimensional ◽

Ion Beam Sputtering ◽

Thin Film Thickness ◽

Optical Thin Film ◽

Beam Sputtering ◽

Beam Parameters

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Optimization of dielectric films with dual ion beam sputtering deposition for high reflectivity mirrors

Materials Today Proceedings ◽

10.1016/j.matpr.2020.11.686 ◽

2021 ◽

Author(s):

Laxminarayana Gangalakurti ◽

K. Venugopal Reddy ◽

I.M. Chhabra

Keyword(s):

Ion Beam ◽

Dielectric Films ◽

Ion Beam Sputtering ◽

Sputtering Deposition ◽

High Reflectivity ◽

Beam Sputtering ◽

Dual Ion Beam Sputtering

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