Effect of assisted ion energy on properties of silicon oxide thin film deposited by dual ion-beam sputtering

2007 ◽  
Vol 105 (5) ◽  
pp. 2444-2452 ◽  
Author(s):  
Jin-Wook Seong ◽  
Daiwon Choi
Keyword(s):  
Thin Film ◽  
Silicon Oxide ◽  
Ion Beam ◽  
Oxide Thin Film ◽  
Ion Beam Sputtering ◽  
Ion Energy ◽  
Beam Sputtering ◽  
Dual Ion Beam Sputtering

Characteristics of optical band gap of tantalum oxide thin film deposited by ion beam sputtering

2017 ◽  
Vol 25 (1) ◽  
pp. 21-27
Author(s):  
刘华松 LIU Hua-song ◽  
杨 霄 YANG Xiao ◽  
王利栓 WANG Li-shuan ◽  
姜玉刚 JIANG Yu-gang ◽  
季一勤 JI Yi-qin ◽  
...  
Keyword(s):  
Thin Film ◽  
Band Gap ◽  
Optical Band Gap ◽  
Ion Beam ◽  
Tantalum Oxide ◽  
Oxide Thin Film ◽  
Ion Beam Sputtering ◽  
Beam Sputtering

Deposition Characteristics of AlN Thin Film Prepared by the Dual Ion Beam Sputtering System

2006 ◽  
Vol 36 (1) ◽  
pp. 81-87 ◽  
Author(s):  
T. L. Hu ◽  
S. W. Mao ◽  
C. P. Chao ◽  
M. F. Wu ◽  
H. L. Huang ◽  
...  
Keyword(s):  
Thin Film ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Beam Sputtering ◽  
Dual Ion Beam Sputtering ◽  
Sputtering System

Annealing effect of the optical properties of tantalum oxide thin film prepared by ion beam sputtering

2018 ◽  
Vol 47 (3) ◽  
pp. 321004
Author(s):  
王利栓 Wang Lishuan ◽  
杨霄 Yang Xiao ◽  
刘丹丹 Liu Dandan ◽  
姜承慧 Jiang Chenghui ◽  
刘华松 Liu Huasong ◽  
...  
Keyword(s):  
Thin Film ◽  
Optical Properties ◽  
Ion Beam ◽  
Tantalum Oxide ◽  
Annealing Effect ◽  
Oxide Thin Film ◽  
Ion Beam Sputtering ◽  
Beam Sputtering

Physical mechanism of refractive index inhomogeneity of hafnium oxide thin film prepared by ion beam sputtering technique

2018 ◽  
Vol 75 ◽  
pp. 135-141 ◽  
Author(s):  
Huasong Liu ◽  
Lishuan Wang ◽  
Shida Li ◽  
Yugang Jiang ◽  
Dandan Liu ◽  
...  
Keyword(s):  
Thin Film ◽  
Refractive Index ◽  
Hafnium Oxide ◽  
Physical Mechanism ◽  
Ion Beam ◽  
Oxide Thin Film ◽  
Ion Beam Sputtering ◽  
Beam Sputtering

Stannic oxide thin film growth via ion-beam-sputtering

2014 ◽  
Vol 553 ◽  
pp. 26-29 ◽  
Author(s):  
Martin Becker ◽  
Robert Hamann ◽  
Angelika Polity ◽  
Bruno K. Meyer
Keyword(s):  
Thin Film ◽  
Film Growth ◽  
Ion Beam ◽  
Thin Film Growth ◽  
Oxide Thin Film ◽  
Stannic Oxide ◽  
Ion Beam Sputtering ◽  
Beam Sputtering
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