Realization of Nano-Wires in Quartz using Focused Ion Beam and ICP/RIE Etching Process for Single Electron Transistor Fabrication

2008 ◽  
Author(s):  
P. Santosh Kumar Karre ◽  
Daw Don Cheam ◽  
Paul L. Bergstrom
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Etching Process ◽  
Single Electron ◽  
Single Electron Transistor ◽  
Transistor Fabrication ◽  
Nano Wires

scholarly journals Room temperature operational single electron transistor fabricated by focused ion beam deposition

2007 ◽  
Vol 102 (2) ◽  
pp. 024316 ◽  
Author(s):  
P. Santosh Kumar Karre ◽  
Paul L. Bergstrom ◽  
Govind Mallick ◽  
Shashi P. Karna
Keyword(s):  
Room Temperature ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Single Electron ◽  
Single Electron Transistor ◽  
Ion Beam Deposition ◽  
Beam Deposition

Nanofabrication on InP using focused ion beam lithography and Cl2 etching: process and control

1993 ◽  
Vol 33 (1-2) ◽  
pp. 158-164 ◽  
Author(s):  
C.H. Chu ◽  
Y.L. Wang ◽  
Y.F. Hsieh ◽  
L.R. Harriott ◽  
H.H. Wade ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Etching Process ◽  
Ion Beam Lithography ◽  
And Control

A Nanodamascene Process for Advanced Single-Electron Transistor Fabrication

2008 ◽  
Vol 7 (1) ◽  
pp. 68-73 ◽  
Author(s):  
Christian Dubuc ◽  
Jacques Beauvais ◽  
Dominique Drouin
Keyword(s):  
Single Electron ◽  
Single Electron Transistor ◽  
Transistor Fabrication

Fabrication Technique for Carbon Nanotube Single-Electron Transistors Using Focused Ion Beam

2004 ◽  
Vol 43 (8A) ◽  
pp. 5669-5670 ◽  
Author(s):  
Yuto Kurokawa ◽  
Yutaka Ohno ◽  
Shigeru Kishimoto ◽  
Toshiya Okazaki ◽  
Hisanori Shinohara ◽  
...  
Keyword(s):  
Carbon Nanotube ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Single Electron ◽  
Fabrication Technique ◽  
Single Electron Transistors ◽  
Electron Transistors
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