Improving gate-oxide reliability by TiN capping layer on NiSi FUSI metal gate

2005 ◽  
Vol 26 (7) ◽  
pp. 458-460 ◽  
Author(s):  
J. Liu ◽  
H.C. Wen ◽  
J.P. Lu ◽  
D.L. Kwong
Keyword(s):  
Gate Oxide ◽  
Metal Gate ◽  
Capping Layer ◽  
Oxide Reliability

Exploration of heavy ion irradiation effects on gate oxide reliability in power MOSFETs

1995 ◽  
Vol 35 (3) ◽  
pp. 603-608 ◽  
Author(s):  
S.R. Anderson ◽  
R.D. Schrimpf ◽  
K.F. Galloway ◽  
J.L. Titus
Keyword(s):  
Ion Irradiation ◽  
Gate Oxide ◽  
Heavy Ion ◽  
Irradiation Effects ◽  
Power Mosfets ◽  
Heavy Ion Irradiation ◽  
Oxide Reliability

The impact of F contamination induced by the process on the gate oxide reliability

1998 ◽  
Vol 38 (2) ◽  
pp. 255-258 ◽  
Author(s):  
G Ghidini ◽  
C Clementi ◽  
D Drera ◽  
F Maugain
Keyword(s):  
Gate Oxide ◽  
Oxide Reliability ◽  
The Impact

Impacts of Area-Dependent Defects on the Yield and Gate Oxide Reliability of SiC Power MOSFETs

2021 ◽  
Author(s):  
Tianshi Liu ◽  
Shengnan Zhu ◽  
Michael Jin ◽  
Limeng Shi ◽  
Marvin H. White ◽  
...  
Keyword(s):  
Gate Oxide ◽  
Power Mosfets ◽  
Oxide Reliability

Atomic Layer Deposition of Zirconium-Based High-k Metal Gate Oxide: Effect of Si Containing Zr Precursor

2015 ◽  
Vol 15 (1) ◽  
pp. 382-385
Author(s):  
Jun Hee Cho ◽  
Sang-Ick Lee ◽  
Jong Hyun Kim ◽  
Sang Jun Yim ◽  
Hyung Soo Shin ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Gate Oxide ◽  
Metal Gate ◽  
Layer Deposition ◽  
High K

scholarly journals A Study on Improvement and Degradation of Si/SiO2Interface Property for Gate Oxide with TiN Metal Gate

2008 ◽  
Vol 9 (1) ◽  
pp. 6-11 ◽  
Author(s):  
Byung-Hyun Lee ◽  
Yong-Il Kim ◽  
Bong-Soo Kim ◽  
Dong-Soo Woo ◽  
Yong-Jik Park ◽  
...  
Keyword(s):  
Gate Oxide ◽  
Metal Gate ◽  
Tin Metal
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