Characterization of Recombination Centers in Si Epilayers After He Implantation by Direct Measurement of Local Lifetime Distribution With the AC Lifetime Profiling Technique
2004 ◽
Vol 25
(9)
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pp. 602-604
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Keyword(s):
Keyword(s):
2018 ◽
Vol 57
(9)
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pp. 092302
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1992 ◽
Vol 13
(2)
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pp. 114-118
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2015 ◽
Vol 43
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pp. 1-9
2002 ◽
Vol 39
(02)
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pp. 434-440
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